A gas protection device, a blade detection device and a dicing machine having the same

Abstract

The invention provides a gas shielding device, a blade detecting device comprising the same and a dicing saw. The gas shielding device comprises a fixing plate and a blowing mechanism, wherein the first end surface of the fixing plate is provided with a gas channel and two opposite gas hole, and the gas channel communicates the two gas holes; the front end of an optical fiber sensor can extends into the gas holes, light emitted by the optical fiber sensor can penetrate through the gas channel in parallel; the blowing mechanism is connected with the fixing plate and provided with an air channelwhich is communicated with the gas channel, and blows air into the gas channel so that an airflow shield can be formed inside the two gas holes. The gas shielding device can avoid influence of cooling water on light transmittance, ensure blade detecting precision and accuracy during a dicing process, greatly improve the blade cutting quality and stability and ensure high-efficiency operation of equipment.

Description

technical field [0001] The invention relates to the field of dicing machine equipment, and more specifically, to a gas protection device, a blade detection device having the same, and a dicing machine. Background technique [0002] During the cutting process of the dicing machine, the integrity or damage of the blade has an extremely important impact on the cutting quality. When there are some large gaps in the blade, if they are not found in time, it will directly affect the quality of the cutting, and it is easy to cause serious defects such as edge chipping and corner chipping. Therefore, it is very necessary to check the integrity of the blade at any time. [0003] Blade breakage detection is one of the core technologies of scribing machines, in which the light transmittance of the key component optical fiber determines the accuracy and accuracy of detection, and cooling water is used as a necessary external condition during the scribing process. When the laser is on th...

AI Technical Summary

Problems solved by technology

When there are some large gaps in the blade, if they are not found in time, it will directly affect the quality of the cutting, and it is easy to cause serious defects such as edge chipping and corner chipping. Therefore, it is very necessary to check the integrity of the blade at any time

[0003] Blade breakage detection is one of the core technologies of scribing machines, in which the light transmittance of the key component optical fiber determines the accuracy and accuracy of detection, and cooling water is a necessary external condition during the scribing process. On the surface, the reflection and refraction that will occur when the laser passes through the cooling water during the emission process will directly affect the transmission of light between the transceiver devices, thus seriously affecting the detection accuracy, accuracy and stability of the laser on the components.

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