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Multiline TRL calibration method and terminal equipment

A calibration method and technology of calibration parts, which are applied in the direction of measuring devices, instruments, and measuring electrical variables, etc., can solve the problem of low measurement accuracy of S parameters

Active Publication Date: 2018-06-01
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of this, embodiments of the present invention provide a multi-line TRL calibration method and terminal equipment to solve the problem of low measurement accuracy of S-parameters in multi-line TRL calibration in the prior art

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  • Multiline TRL calibration method and terminal equipment
  • Multiline TRL calibration method and terminal equipment
  • Multiline TRL calibration method and terminal equipment

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Embodiment 1

[0172] figure 1 The implementation process of the multi-line TRL calibration method provided by the first embodiment of the present invention is shown, and the details are as follows:

[0173] Step S101 , analyze the error in the TRL calibration process, and establish an error analysis model for solving the propagation constant and the calibration constant.

[0174] In this step, the error in the TRL calibration process is analyzed, and the process of establishing an error analysis model for solving the propagation constant and the calibration constant is:

[0175] The cascaded transmission matrix M of the ith calibration piece measured by the vector network i for

[0176]

[0177] Among them, T i is the actual transmission matrix of the calibration part i, X and Y are the transmission matrix of the error network to be determined, that is, the calibration constant; Indicates that the direction of signal transmission is reversed to that of Y. For example, if Y repres...

Embodiment 2

[0270] Corresponding to the multi-line TRL calibration method described in the above embodiment, Figure 7 A schematic diagram of the running environment of the multi-line TRL calibration program provided by the embodiment of the present invention is shown. For convenience of explanation, only the parts related to this embodiment are shown.

[0271] In this embodiment, the multi-line TRL calibration program 200 is installed and run in the terminal device 20 . The terminal device 20 may include, but is not limited to, a memory 201 and a processor 202 . Figure 7 Only the terminal device 20 is shown with components 201-202, but it should be understood that implementation of all shown components is not a requirement, and more or fewer components may be implemented instead.

[0272] In some embodiments, the memory 201 may be an internal storage unit of the terminal device 20 , such as a hard disk or a memory of the terminal device 20 . In other embodiments, the memory 201 may a...

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Abstract

The invention provides a multiline TRL calibration method and terminal equipment. The method comprises steps: errors in a TRL calibration process are analyzed, and an error analysis model for solvinga propagation constant and a calibration constant is established; multiple redundant transmission lines are used as a standard to cover each frequency point, a public line is selected according to aneffective phase shift rule, the public line and each other transmission line form a line pair, independent measurement is formed in each line pair, and according to the error analysis model, the observation values of multiple groups of propagation constants and calibration constants are obtained; and through a preprocessing method, the measurement results of the transmission lines are processed, and a public transmission line is updated according to the processing result. The above method and the terminal equipment can improve the on-wafer S parameter test accuracy.

Description

technical field [0001] The invention belongs to the technical field of microwave characteristic measurement of wafer-level semiconductor devices, and in particular relates to a multi-line TRL calibration method and terminal equipment. Background technique [0002] A large number of "on-chip S-parameter test systems" equipped in the microelectronics industry need to use on-chip calibration parts for vector calibration before use. The types of calibration parts include SOLT (Short-Open-Load-Thru), TRL (Thru-Reflect -Line), LRRM (Line-Reflect-Reflect-Match), etc. There are two main reasons that affect the calibration accuracy of the on-chip vector grid: one is the systematic error introduced by the reference impedance of the system, and the other is the repeatability error of the contact between the probe and the DUT. [0003] The reference impedance of SOLT calibration is Load, and the characteristic impedance of the straight-through line is designed to be equal to it, but th...

Claims

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Application Information

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IPC IPC(8): G01R35/00
CPCG01R35/005
Inventor 王一帮栾鹏吴爱华梁法国霍烨
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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