Hydrogen annealing furnace tail gas treatment system and treatment method thereof

Abstract

The invention relates to a hydrogen annealing furnace tail gas treatment system which comprises a tail gas outlet pipe and a hydrogen tail gas combustion apparatus. One end of the tail gas outlet pipeis connected with a reaction tube, and the other end of the tail gas outlet pipe is connected with the hydrogen tail gas combustion apparatus; and a hydrogen measurement assembly used for measuring tail gas flow and hydrogen concentration in the tail gas outlet pipe, an oxygen flow measurement assembly used for measuring flow of oxygen injected into the hydrogen tail gas combustion apparatus andan intelligent control operation terminal used for receiving data transmitted by the hydrogen measurement assembly and controlling the oxygen flow of the oxygen flow measurement assembly according tothe received data are further included. The invention further discloses a tail gas treatment method, by measuring the hydrogen concentration and the tail gas flow, according to the hydrogen concentration and flow, an appropriate amount of oxygen is led in, and after hydrogen sufficiently and safely burns inside the combustion apparatus, the tail gas is discharged into the atmospheric environment.The hydrogen annealing furnace tail gas treatment system has the beneficial effects of being high in control accuracy, good in safety performance, high in reliable performance, simple in structure andthe like.

Description

technical field [0001] The invention relates to semiconductor production equipment, in particular to a hydrogen tail gas treatment system of a high-temperature hydrogen annealing furnace and a treatment method thereof. Background technique [0002] In the semiconductor industry, as the size of single crystal silicon continues to increase, the defects inside the crystal will also continue to increase. The above defects can be effectively avoided by using the hydrogen annealing process in a high temperature environment. The safety during the use of hydrogen annealing furnace is very important, mainly because flammable and explosive hydrogen is used as the process gas in the process, and a little carelessness may cause fire or explosion accidents. The explosion limit of hydrogen in the air is 4%-72%, and the ignition point is low. With the continuous improvement of process requirements, the concentration of protective hydrogen is also increasing. At present, the industry gradua...

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Problems solved by technology

However, these methods have the defect of not being able to accurately control the amount of oxygen required for combustion, which easily leads to the danger of explosion when the amount of oxygen is insufficient or the concentration of hydrogen reaches a certain level.

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