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Low-refractive-index infrared optical coating material and preparing method thereof

A technology of infrared optics and low refractive index, applied in sputtering coating, metal material coating process, ion implantation coating, etc. Reduce and solve film cracks and ensure stable results

Active Publication Date: 2018-04-06
凯永(固安)光电技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the growth of crystals has a certain directionality, for example, in the process of freezing water, it usually grows in a specific direction first, which usually leads to the microscopic inhomogeneity of the formed film. This microscopic inhomogeneity, in Stress will be formed when multi-layer coating is applied, resulting in film cracking

Method used

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  • Low-refractive-index infrared optical coating material and preparing method thereof

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Effect test

Embodiment 1

[0017] A low-refractive-index infrared optical coating material is composed of two fluorides, ytterbium fluoride and calcium fluoride.

[0018] The weight ratio of infrared optical coating materials is:

[0019] Ytterbium fluoride: 85, calcium fluoride: 0.5.

[0020] A method for preparing a low-refractive-index infrared optical coating material, comprising the following steps;

[0021] Proportioning step; according to the weight ratio of infrared optical coating materials:

[0022] Ytterbium fluoride: 85, calcium fluoride: 0.5, prepare materials according to weight ratio,

[0023] Sintering step: sintering the mixture of ytterbium fluoride and calcium fluoride obtained after proportioning, the sintering temperature is 700°C, and the obtained sintered mixture can be particles or flakes of different sizes.

Embodiment 2

[0025] A low-refractive-index infrared optical coating material is composed of two fluorides, ytterbium fluoride and calcium fluoride.

[0026] The weight ratio of infrared optical coating materials is:

[0027] Ytterbium fluoride: 89, calcium fluoride: 12.

[0028] A method for preparing a low-refractive-index infrared optical coating material, comprising the following steps;

[0029] Proportioning step; according to the weight ratio of infrared optical coating materials:

[0030] Ytterbium fluoride: 89, calcium fluoride: 12, prepare materials according to weight ratio,

[0031] Sintering step: sintering the mixture of ytterbium fluoride and calcium fluoride obtained after proportioning, the sintering temperature is 1250°C, and the obtained sintered mixture can be particles or flakes of different sizes.

Embodiment 3

[0033] A low-refractive-index infrared optical coating material is composed of two fluorides, ytterbium fluoride and calcium fluoride.

[0034] The weight ratio of infrared optical coating materials is:

[0035] Ytterbium fluoride: 99.5, calcium fluoride: 15.

[0036] A method for preparing a low-refractive-index infrared optical coating material, comprising the following steps;

[0037] Proportioning step; according to the weight ratio of infrared optical coating materials:

[0038] Ytterbium fluoride: 99.5, calcium fluoride: 15, prepare materials according to weight ratio,

[0039] Sintering step: sintering the mixture of ytterbium fluoride and calcium fluoride obtained after proportioning, the sintering temperature is 1000°C, the obtained sintered mixture can be particles or sheets of different sizes.

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Abstract

The invention relates to a low-refractive-index infrared optical coating material and a preparing method thereof, and belongs to the technical field of optical coating materials. According to the weight proportions of ytterbium fluoride and calcium fluoride, the ytterbium fluoride ranges from 85%-99.5%, the calcium fluoride ranges from 0.5%-15%, a ytterbium fluoride and calcium fluoride mixture obtained after proportioning is sintered, the sintering temperature is 700 DEG C-1250 DEG C, and the fusion step is executed; and the sintered sintering mixture is subject to vacuum fusion for 3 h to 6h at above 1260 DEG C, and a ytterbium fluoride and calcium fluoride fusion mixture is obtained. The low-refractive-index infrared optical coating material has the beneficial effects that in the ytterbium fluoride material, a certain amount of calcium fluoride is guided in, the ytterbium fluoride and the calcium fluoride evaporate at the same time and are deposited on the optical surface, due to the difference of crystalline forms of the calcium fluoride and the ytterbium fluoride, the directional growth condition in the original single ytterbium fluoride deposition process is prevented, and an even optical film layer with the small internal stress is formed; and as the internal stress is reduced, when a multi-layer film is plated, stability of the multi-layer film is guaranteed, and the problem of film cracking of the multi-layer film is solved.

Description

technical field [0001] The invention relates to a low-refractive-index infrared optical coating material and a preparation method thereof, belonging to the technical field of optical coating materials. Background technique [0002] In the field of optical coatings, ytterbium fluoride is a commonly used low-refractive-index infrared optical coating material. Due to its good infrared transmission performance and high film strength, it is often used to coat germanium and chalcogenide infrared glass anti-reflection coatings. During the film formation process, due to the deposition of ytterbium fluoride on the surface of the optical element, it is also recrystallized on the optical surface. Since the growth of crystals has a certain directionality, for example, in the process of freezing water, it usually grows in a specific direction first, which usually leads to the microscopic inhomogeneity of the formed film. This microscopic inhomogeneity, in the Stress builds up when multi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/24
CPCC23C14/0694C23C14/24
Inventor 秦海波
Owner 凯永(固安)光电技术有限公司
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