Large radial displacement margin type laser heterodyne interference angle measurement device and method

Abstract

The present invention discloses a large radial displacement margin type laser heterodyne interference angle measurement device and a method thereof. According to the invention, two faraday rotators are adopted to realize the exact orthogonal transformation of the linearly polarized light in the polarization direction in a laser heterodyne interference angle measurement light path. The device comprises a laser heterodyne interference angle detection light path part and an angle measurement mirror. According to the invention, a light path structure is formed by faraday rotators, a polarization beam splitter, a quarter-wave plate and a plane mirror. Based on the light path structure, when a large radial displacement error occurs in a measurement mirror, the effective return of a measurement light beam is realized. According to the invention, the technical problem in the prior art that based on traditional laser interference measurement mirror angle measurement techniques, the measurementlight beam deviates from an initial detection aperture on a detector, caused by the large radial displacement of the measurement mirror, so as to influence the normal generation of interference signals and even cause the interruption of interference measurement can be solved. The angle measurement of high resolution and large measurement range can be realized. The device and the method are suitable for the angle measurement and calibration of precision operating platforms in the fields of precision machining, manufacturing, mechanical system adjustment, calibration and the like.

Description

Technical field [0001] The invention relates to a measurement method characterized by adopting an optical method, in particular to a laser heterodyne interference angle measuring device and method with a large radial displacement margin. Background technique [0002] The motion posture of a space object can be described by six degrees of freedom, including three translations along an axis and three rotations around an axis. Angle measurement is an important part of precision geometric measurement technology. The realization of angle measurement that takes into account both high resolution and large measurement range is the position calibration and adjustment of mechanical systems, processing and manufacturing in the field of advanced manufacturing, and precision measurement and calibration in the field of metrology. To achieve the improvement of technical level and realize the common demand of technological innovation. Because of its high measurement accuracy, large dynamic meas...

AI Technical Summary

Problems solved by technology

[0003] In order to solve the technical problem that the large radial displacement error of the measuring mirror in the traditional laser interferometry technology causes the measuring beam to deviate from the initial detection aperture on the detector, affecting the normal generation of the interference signal and even causing the interruption of the interferometric measurement, the purpose of the present invention is to provide A large radial displacement margin laser heterodyne interference angle measurement device and method to solve the above problems

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