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Mask for evaporation and preparation method

A mask plate and mask substrate technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of mask plate deformation, uneven wrinkles, etc.

Active Publication Date: 2018-02-23
TRULY HUIZHOU SMART DISPLAY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Based on this, it is necessary to provide a mask plate for evaporation and a preparation method for the deformation of the mask plate and the occurrence of uneven wrinkles.

Method used

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  • Mask for evaporation and preparation method
  • Mask for evaporation and preparation method

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Embodiment Construction

[0040]In order to facilitate the understanding of the present invention, the mask plate for evaporation and the preparation method will be more fully described below with reference to the relevant drawings. The preferred embodiment of the mask plate used for evaporation and the preparation method is given in the accompanying drawings. However, the mask used for evaporation and the preparation method can be implemented in many different forms, and are not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the mask used for evaporation and the preparation method more thorough and comprehensive.

[0041] It should be noted that when an element is referred to as being “fixed” to another element, it can be directly on the other element or there can also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element...

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Abstract

The invention relates to a mask for evaporation and a preparation method. The mask for evaporation includes a frame, a transverse support bar, a sheltering bar, a mask substrate and a vertical supportbar; a first mounting groove, a second mounting groove, a third mounting groove and a fourth mounting groove are formed in the frame, the first mounting groove and the second mounting groove both extend in the horizontal direction of the frame, and both the third mounting groove and the fourth mounting groove extend in the vertical direction of the frame; the two ends of the transverse support bar are located in the first mounting groove and the second mounting groove respectively; the two ends of the sheltering bar are located in the third mounting groove and the fourth mounting groove respectively, and the transverse support bar is connected with the sheltering bar in a lap joint mode; the vertical support bar and the mask substrate jointly bear the pressing gravity of a substrate, thus, the deformation of the mask substrate which is caused by the extrusion of the substrate is alleviated, the service life of the mask is prolonged, and the problem is avoided that because opening patterns of an effective area of the mask substrate deform due to the deformation of the mask substrate, colour cast and even colour mixture occur.

Description

technical field [0001] The invention relates to the technical field of organic light emitting diodes, in particular to a mask plate for evaporation and a preparation method. Background technique [0002] In recent years, an organic light emitting diode (Organic Light Emitting Diode, OLED) display has become a very popular emerging flat panel display product at home and abroad. OLED displays have the advantages of self-illumination, wide viewing angle, short response time, wide color gamut, low operating voltage, thin panel, easy to make flexible panel and wide operating temperature range. [0003] The vacuum evaporation method used in the preparation of traditional OLED devices is to heat and evaporate the plating material in a vacuum, so that the evaporated atoms or atomic groups are deposited on the lower temperature substrate and form a thin film. The stability of the evaporation process determines the quality of the film. In order to achieve color display, it is necess...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 周扬川柯贤军吴俊雄冉应刚苏君海李建华
Owner TRULY HUIZHOU SMART DISPLAY
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