Method for determining spatially resolved height information of a sample by means of a wide-field microscope, and wide-field microscope

A technology of height information and microscopy, applied in the direction of microscopes, optical devices, optics, etc., can solve problems such as interference and influence of measurement results

Active Publication Date: 2018-02-16
CARL ZEISS MICROSCOPY GMBH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] Finally, common to all systems based on structured illumination is that vibrations can have a disturbing effect on the measurement results during phase pattern changes and / or when the sample or sensor is moved in the z-direction

Method used

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  • Method for determining spatially resolved height information of a sample by means of a wide-field microscope, and wide-field microscope
  • Method for determining spatially resolved height information of a sample by means of a wide-field microscope, and wide-field microscope
  • Method for determining spatially resolved height information of a sample by means of a wide-field microscope, and wide-field microscope

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Embodiment Construction

[0052] In the following description of the figures, the same reference numerals are used for the same elements. Their functional description also applies to figures or embodiments in which they are not explicitly mentioned.

[0053] figure 1 A first preferred embodiment of the wide-field microscope according to the invention is shown. A polychromatic illumination source 1 (eg broadband laser, halogen lamp, superluminescent diode, . . . ), wherein in this embodiment different spectral distributions can be selected by means of a selection element 2 . This selection element 2 can be eg an AOTF (Acousto-Optic Tunable Filter), a prism, a grating or even a filter selection unit. The illumination light can then be deflected in different directions by the deflection unit 3 . The deflection unit 3 is eg a rapidly switchable mirror (eg a galvanometer mirror), an AOD (Acousto Optical Deflector) or a polarization rotation based switching unit.

[0054] The structuring element 4 is arr...

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Abstract

The invention relates to a wide-field microscope and to a method for determining spatially resolved height information of a sample (14) by means of a wide-field microscope. The wide-field microscope comprises an illumination source (1, 52, 53), which is arranged in an illumination beam path; a first detector unit (17, 33) for capturing a wide-field image in an observation beam path of a sample (14) illuminated in a sample plane (P); a modulator for chromatically modulating the illumination beam path or the observation beam path in a direction perpendicular to the sample plane (P); an evaluating unit for determining chromatic confocal height information in each pixel of the wide-field image. The method comprises the following steps: illuminating the sample (14) by means of a wide-band illumination source (1) in an illumination beam path; chromatically modulating the illumination beam path or a detection beam path; capturing at least one wide-field image from sample light reflected or emitted by the sample in the detection beam path, said sample light having chromatic confocal components; determining, pixel by pixel, height information of the sample from the wide-field image by evaluating chromatic confocal components of the detection beam path in accordance with the chromatic modulation.

Description

technical field [0001] The invention relates to a method and a wide-field microscope for determining spatially resolved height information of a sample using a wide-field microscope. Background technique [0002] The determination of spatially resolved height information of a sample is also referred to as optical sectioning. Such optical sections are used in particular in microscopy to determine topographic images of samples or to measure surface properties of samples such as roughness. [0003] For the characterization of technical surfaces, confocal microscopy is used today as a standard method. In most cases here sampling of the sample takes place in all three spatial directions, ie involving point scanning systems where the light beam is directed over the sample in x / y directions. In order to derive height information, a movement of the sample relative to the detector unit (in z-direction) is required. From the z-position dependent intensity maxima, height information ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B21/00G01B11/24
CPCG01B11/24G01B2210/50G02B21/0032G02B21/0064
Inventor 赫尔穆特·利珀特尼尔斯·兰霍斯拉尔夫·内茨拉尔夫·沃利斯彻斯基
Owner CARL ZEISS MICROSCOPY GMBH
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