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System and method for testing surface quality of Wolter-I--type mandrel by adopting contact-type contourgraph

A testing system and surface quality technology, applied in the field of ultra-precision measurement, can solve the problems of not finding reference vertices, difficult to inspect the surface quality of mandrels, etc., to avoid the effect of long measurement time

Active Publication Date: 2018-02-13
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] Aiming at the problem that the surface quality inspection of Wolter-I type mandrel is difficult, the present invention provides a test system and method for testing the surface quality of Wolter-I type mandrel by using a contact profiler. The contact profiler is used to measure its size, surface Contour shape, waviness and roughness, fixed issue where reference vertices could not be found

Method used

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  • System and method for testing surface quality of Wolter-I--type mandrel by adopting contact-type contourgraph
  • System and method for testing surface quality of Wolter-I--type mandrel by adopting contact-type contourgraph
  • System and method for testing surface quality of Wolter-I--type mandrel by adopting contact-type contourgraph

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specific Embodiment approach 1

[0045] Embodiment 1: This embodiment provides a method for testing the surface quality of a Wolter-I mandrel using a contact profiler. The specific implementation steps are as follows:

[0046] 1. Build a measurement system

[0047] In order to ensure the accuracy of the measurement of the axisymmetric aspheric surface by the contact profiler, the probe of the profiler must move along the meridian section profile curve of the aspheric surface. Therefore, it is necessary to design an auxiliary adjustment device to precisely adjust the relative position between the mandrel and the probe. The auxiliary adjustment device includes an X-axis linear displacement table 3, a horizontal rotary table 2, a vertical surface rotary table 1, and a chuck 5 for clamping workpieces. Among them, the X-axis linear displacement table 3 is fixedly installed on the table surface of the profiler detection platform, and its motion direction is perpendicular to the motion direction of the probe 6, and...

specific Embodiment approach 2

[0062] Specific embodiment two: the Woler I type mandrel used in the experiment in this embodiment is made of ellipsoidal surface and hyperboloid, analyze and calculate with the inspection of ellipsoidal surface quality as example, draw its performance index, hyperboloid surface quality inspection The method of analysis and calculation is the same as that of the ellipsoid. It is known that the diameters corresponding to points R and B on the ellipsoid are d R =150.4872mm and d B =153.4338mm, axial distance L RB =101.3474mm, such as image 3 shown. A probe with a radius of 2 μm was selected, and the sampling interval was set to 1 μm, and the measurement experiment was carried out on the mandrel after ultra-precision turning. Starting from point R, take 70,000 measurement points on the meridian section curve of the ellipsoid for analysis, corresponding to a measurement length of 70mm, and the measurement results are as follows:

[0063] 1) Mandrel radial size error (diamete...

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Abstract

The invention discloses a system and method for testing the surface quality of Wolter-I-type mandrel by adopting a contact-type contourgraph. The test system consists of two portions, i.e., a countourgraph and an auxiliary adjusting apparatus, wherein the auxiliary adjusting apparatus comprises an axis-X rectilinear displacement platform, a horizontal rotary turntable, a vertical surface rotary turntable and a chuck for clamping a workpiece, the axis-X rectilinear displacement platform is fixedly installed on a table-board of a contourgraph detection platform, the horizontal rotary turntable is fixedly installed on the axis-X rectilinear displacement platform, the vertical surface rotary turntable is fixedly installed on the horizontal rotary turntable, and the chuck is fixedly installed on the vertical surface rotary turntable and used for installing and clamping the mandrel. By adopting the system and method, performance indexes of the Wolter-I-type mandrel such as dimension errors,surface roughness, corrugation degree and shape errors can be detected, no other additional ultra-precision measurement instrument is needed, the purchasing cost of the ultra-precision measurement instrument can be reduced, the measurement times can be reduced, and the measurement efficiency can be increased.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision measurement, and relates to a testing system and method for testing the surface quality of Wolter-I type mandrels, in particular to a testing system and method for testing the surface quality of Wolter-I type mandrels using a contact profiler . Background technique [0002] Woler type I imaging system is an important grazing incidence imaging system, which is widely used in X-ray grazing incidence optics, such as: X-ray telescope for astronomical observation, X-ray microscope for sample detection, extreme ultraviolet (EUV) lithography system Optical collectors in etc. The single-layer Woler I mirror is composed of two coaxial confocal axisymmetric aspheric surfaces, such as figure 1 shown. Among them, S is the point light source, I is the image of S, R is the intersection of two aspheric meridian section curves, and A and B are the endpoints of the meridian. The aspherical surface 1 an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/20G01B21/30
CPCG01B21/20G01B21/30
Inventor 孔繁星孙涛王骐
Owner HARBIN INST OF TECH
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