Ultrahigh temperature pressure sensor and manufacturing method thereof

Abstract

The present invention discloses an ultrahigh temperature pressure sensor and a manufacturing method thereof. The ultrahigh temperature pressure sensor is composed of a pressure leading member with radiating fins, a pressure guiding member, a radiating ring and a shell, and is characterized in that the pressure guiding member is a cylinder of which the upper central position is equipped with an upper central pressure leading hole, the lower central position is equipped with a lower central pressure leading hole that is not communicated with the upper central pressure leading hole, the middle periphery is equipped with a pressure guiding groove, the lower part is equipped with a lower pressure guiding hole communicated with the lower central pressure leading hole and the pressure guiding groove, and the upper part is equipped with an upper pressure guiding hole communicated with the upper central pressure leading hole and the pressure guiding groove. The two levels radiating structures of the radiating fins and the radiating ring are adopted, so that the temperature of a medium is overall reduced to about 25% of an original temperature, and accordingly, a sputtering thin film pressure core body suitable for the high temperature can measure the pressure of a high temperature medium not more than 600 DEG C very well. Meanwhile, the ultrahigh temperature pressure sensor retains theadvantages of a sputtering thin film pressure sensor of being small in size, high in measurement precision and good in stability, etc., and can be applied to the ultrahigh temperature medium pressuremeasurement field very well.

Description

technical field [0001] The invention relates to a pressure sensor, in particular to an ultra-high temperature pressure sensor capable of measuring the pressure of an ultra-high temperature medium and a manufacturing method thereof. Background technique [0002] Sputtering film pressure sensor is a kind of pressure sensor with excellent performance. It has the advantages of high precision, good stability and high temperature of measuring medium. field is applied. However, when the temperature of the medium exceeds 300°C and reaches a maximum of 600°C, ordinary sputtered thin-film pressure sensors are not competent. [0003] When the pressure core of the existing thin-film pressure sensor directly contacts the high-temperature medium, the measurable temperature of the high-temperature medium can reach 220°C. If the temperature continues to rise, the temperature drift of the sensor will increase, which will affect the measurement accuracy of the sensor. However, in industries...

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Problems solved by technology

However, when the temperature of the medium exceeds 300°C, up to 600°C, ordinary sputtered thin-film pressure sensors are not competent.

[0003] When the pressure core of the existing thin-film pressure sensor is in direct contact with the high-temperature medium, the measurable temperature of the high-temperature medium can reach 220°C. If the temperature continues to rise, the temperature drift of the sensor will increase, which will affect the measurement accuracy of the sensor.

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