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Adaptive synchronous control method of fractional arc micro-electromechanical system

A micro-electromechanical system, synchronous control technology, applied in the direction of adaptive control, general control system, control/regulation system, etc.

Active Publication Date: 2017-12-15
HUAIYIN INSTITUTE OF TECHNOLOGY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of synchronous control of fractional-order arc micro-electro-mechanical systems with unknown functions, chaotic vibration and time delay characteristics under distributed electrostatic excitation. The present invention provides a self-adaptive The synchronous control method reduces the influence of uncertain factors on the stability and reliability of the system, and realizes the synchronous control of the driving system and the response system

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  • Adaptive synchronous control method of fractional arc micro-electromechanical system
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  • Adaptive synchronous control method of fractional arc micro-electromechanical system

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[0063] The present invention will be further described below in conjunction with the accompanying drawings. The following examples are only used to illustrate the technical solution of the present invention more clearly, but not to limit the protection scope of the present invention.

[0064] The following is a detailed description of the theory that appears below:

[0065] (1) Chebyshev neural network

[0066] By solving the inequality in a two-term recurrence formula, Chebyshev polynomials are defined as:

[0067] T i+1 (X)=2XT i (X)-T i-1 (X),T 0 (X)=1

[0068] where X ∈ R, T 1 (X) is usually defined as X, 2X, 2X-1 or 2X+1.

[0069] Chebyshev neural network has the ability to approximate any nonlinear continuous function with arbitrarily small precision error on a compact set, for X=[x 1 ,...,x m ] T ∈R m , defining the enhanced mode of Chebyshev polynomials as

[0070] ξ(X)=[1,T 1 (x 1 ),…,T n (x 1 ),…,T 1 (x m ),…,T n (x m )]

[0071] where T i (x ...

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Abstract

The invention discloses an adaptive synchronous control method of a fractional arc micro-electromechanical system, which comprises the following steps: 1)establishing a driving system and a responding system model of a fractional arc micro-electromechanical system based on Euler-Bernoulli beams to obtain the synchronous error vector; 2)constructing the Chebyshev neural network with adaptive control law according to the error vector; using the fractional Lyapunov function to construct the virtual control input; using the Chebyshev neural network to estimate the unknown nonlinearity function for the system; in combination with fractional adaptive law, constituting the actual control input; in the back stepping framework, constructing an adaptive synchronization controller; and inputting the controller's output signal to the responding system in the fractional arc micro-electromechanical system. The method of the invention realizes the synchronous control between the driving system and the responding system which ensure the transient and steady performance of the system and reduces the influence of the uncertain factors in the fractional arc micro-electromechanical system on the synchronous control performance.

Description

technical field [0001] The invention relates to a fractional arc microelectromechanical system, in particular to an adaptive synchronous control method for a fractional arc microelectromechanical system. Background technique [0002] Micro-electro-mechanical systems refer to those controllable and movable micro-electro-mechanical devices whose outline dimensions are below the millimeter level and whose constituent elements are on the micron level. It is the inevitable result of people's continuous pursuit of high-tech miniaturization since the advent of microelectronics technology. MEMS is a micro-device or system that integrates micro-sensors, micro-actuators, micro-mechanical structures, micro-power sources, signal processing and control circuits, high-performance electronic integrated devices, interfaces, and communications. MEMS is a revolutionary new technology, widely used in high-tech industries, and a key technology related to the country's technological development...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B13/04
CPCG05B13/045
Inventor 罗绍华吴松励T·法里德曹苏群孙全平
Owner HUAIYIN INSTITUTE OF TECHNOLOGY
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