Masking apparatus for cathode ring repair and method of use thereof

Abstract

The invention discloses a mask device for cathode ring repair and its application method. The mask device includes a mask, and the mask includes a display area shielding part, a hollow part and a reinforcing rib, and the hollow part passes through The reinforcing rib is connected to the periphery of the display area shielding part. The mask device of the present invention is used for shielding protection when the cathode ring is repaired, preventing the repair material of the cathode ring from entering the display area of ​​the device and affecting the photoelectric performance of the device such as brightness and display uniformity, and avoiding the use of sputtering to prepare metal oxidation. The black spot defects caused by the material transparent conductive protective layer can be used to achieve cathode ring protection by using various PVD processes such as sputtering and evaporation, which ensures the light output and process compatibility of the device to the greatest extent.

Description

technical field [0001] The invention relates to a mask device for repairing cathode rings, in particular to a mask device suitable for repairing cathode rings of OLED microdisplays and a method for using the same. Background technique [0002] In the production and preparation process of OLED microdisplays, a top-emitting light-emitting device structure is generally used, and its anode usually adopts a thick metal layer to ensure high reflectivity. preparation, while the cathode is prepared with a very thin layer of thermal evaporation to ensure the light output A translucent metal layer is achieved. Due to the large difference in thickness, it often leads to breakage and poor contact between the edge step of the anode metal layer and the semi-transparent cathode layer, which causes the device driving voltage to increase or open circuit failure. However, simply thickening the metal cathode layer will lead to a significant decrease in the light output of the device. [0...

AI Technical Summary

Problems solved by technology

Due to the large difference in thickness, it often leads to breakage and poor contact when the edge step of the anode metal layer contacts the semi-transparent cathode layer, which causes the device drive voltage to increase or open circuit failure

However, simply thickening the metal cathode layer will lead to a significant decrease in the light output of the device.

[0003] At present, adding a layer of transparent conductive layer (ITO) on the cathode layer by sputtering can solve the problem of cathode fracture, but the sputtering method itself will generate a large number of high-speed particles impacting the surface of the device, causing black spot defects, and greatly reducing the yield

However, all transparent conductive films currently used are prepared by sputtering due to their high evaporation temperature, which cannot solve the problem of black spot defects.

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