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Three-axis capacitive accelerometer

An accelerometer and capacitive technology, applied in the direction of measuring acceleration, speed/acceleration/shock measurement, measuring devices, etc., can solve the problem of increasing axis cross coupling and achieve the effect of avoiding axis cross coupling

Active Publication Date: 2017-10-20
SENODIA TECH (SHANGHAI) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But this method of capacitive accelerometer detection completely sharing a mass must increase the axis cross-coupling, especially when the sensitive mode of the mass in a certain axis is implemented in a rotational manner

Method used

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Embodiment Construction

[0049] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0050] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0051] refer to Figure 1-Figure 8 , figure 1 A top view of a three-axis capacitive accelerometer provided in an embodiment of the present invention, figure 2 for figure 1 The pattern structure of the moving p...

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Abstract

The invention discloses a three-axis capacitive accelerometer. The three-axis capacitive accelerometer comprises a substrate, a movable part and multiple fixed electrodes, wherein a surface of the substrate has a fixed anchor point, the movable part is arranged on the fixed anchor point and has a first mass block, a second mass block and a third mass block, the multiple fixed electrodes are a first electrode set, a second electrode set and a third electrode set, the first electrode set is used for forming an X-axis detection capacitor together with the second mass block to detect acceleration input along an X axis, the second electrode set is used for forming a Y-axis detection capacitor together with the first mass block to detect acceleration inputted along the Y axis, and the third electrode set is used for forming a Z-axis detection capacitor together with the third mass block to detect acceleration inputted along the Z axis. The three-axis capacitive accelerometer is advantaged in that detection on acceleration in the X-axis, Y-axis and Z-axis directions in a right angle coordinate system can be realized, through arranging motion dimensions of the mass blocks, a problem of axis cross coupling can be avoided.

Description

technical field [0001] The present invention relates to a micro-electro-mechanical system (Micro-Electro-Mechanical System referred to as MEMS), and more specifically relates to a three-axis capacitive accelerometer. Background technique [0002] Due to its small size, low cost, good integration, excellent performance and many other advantages, the micro accelerometer made by MEMS has been used more and more in a wide range of fields such as industry, medical treatment, civil use and military affairs. At present, in the application of various mobile terminals, cameras, game controllers, navigators and other products, to a certain extent, micro accelerometers have become standard configurations. In the development process, capacitive, resistive and piezoelectric methods are the main mechanisms used to detect acceleration. Among them, the capacitive accelerometer has become the most popular type of accelerometer because of its simple structure, low cost, and high sensitivity ...

Claims

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Application Information

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IPC IPC(8): G01P15/125
CPCG01P15/125
Inventor 邹波郑青龙
Owner SENODIA TECH (SHANGHAI) CO LTD
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