Electron microscope detection method and device of dynamic process for carrying out localized irradiation on sample surface by laser

Abstract

The invention provides an electron microscope detection method and device of a dynamic process for carrying out localized irradiation on a sample surface by laser. The electron microscope detection method comprises the following steps: introducing a focused laser beam into a sample chamber of a scanning electron microscope; putting a sample on a sample platform of the scanning electron microscope and adjusting a focusing position of an electron beam and a laser beam light path, so as to overlap the focal point of the focused laser beam with the focal point of the electron beam and enable an included angle to be formed between the incidence direction of the focused laser beam and the incidence direction of the electron beam; carrying out observation detection on the sample by adopting the scanning electron microscope; outputting the focused laser beam to carry out the localized irradiation on the sample surface simultaneously or lingeringly; detecting dynamic changes of a matter structure under laser irradiation in real time through the scanning electron microscope; closing the laser; finishing the operation of the scanning electron microscope. By adopting the electron microscope detection method and device, provided by the invention, the laser localized irradiation is carried out on tiny parts of the sample, controllable physical-state changes including topspeed heating, melting, sublimation and the like can be generated on a laser irradiation micro-region and pollution to the chamber is hardly generated; a dynamic change process of the matter structure of the sample at temperature higher than a melting point can be researched.

Description

technical field [0001] The invention belongs to the technical field of detection, and in particular relates to an electron microscope detection method and device for the dynamic process of laser localized irradiation on the surface of a sample. Background technique [0002] After the laser irradiates the surface of the material, the laser energy is absorbed by the material and converted into heat. Under the irradiation of laser beams with different energy densities, the surface of the material undergoes different types of changes. These changes include temperature rise of the material, melting and gasification of the material, generation of small holes in the material, and generation of photoplasma, etc. [0003] Scanning electron microscopy is based on the generation mechanism of different information when high-energy electrons interact with substances, and uses different information detectors to collect information to obtain the microscopic morphology characteristics and c...

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Problems solved by technology

[0005] At present, the general method used to observe the dynamic change process of the material structure of the sample at high temperature is to add a heating element to the sample stage of the electron microscope to heat the sample as a whole. This method has great limitations. First, the overall heating causes The temperature of all objects in the vacuum chamber, including components, will rise accordingly, which will affect the life of the equipment, and even cause the overall strong discharge of the sample to damage the equipment; second, the overall heating is a quasi-equilibrium process, and the heating and cooling are slow. The third is that the heating temperature is limited. In order not to pollute the chamber, generally the dynamic change process of the material structure of the sample at a high temperature above the melting point is not studied through overall heating.

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