Anti-EMI (electro magnetic interference) microwave power distributor and manufacturing method thereof

Abstract

The invention discloses an anti-EMI (electro magnetic interference) microwave power distributor and a manufacturing method thereof and relates to the technical field of semiconductor and microelectronic packaging. The anti-EMI microwave power distributor comprises a top silicon-based substrate, a bottom silicon-based substrate, a resistor film, a top metal layer, a middle metal layer and a bottom metal layer; the anti-electromagnetic radiation power distributor is processed with a silicon-based MEMS (micro-electromechanical systems) processing technology. The power distributor uses a microwave transmission wire metal layer adopting a banded structure and comprises the top silicon-based substrate and the bottom silicon-based substrate, and the metal layers and the resistor layer are manufactured with a silicon-based MEMS surface silicon processing technology. Silicon through holes are formed with a silicon-based MEMS body silicon processing technology, and top metal and bottom metal are interconnected. By means of the structure, the size of the device is reduced, microwaves are transmitted in a TEM mode at the banded line part, upper metal has an effective shielding effect on electromagnetic waves, thus, space radiation of the electromagnetic waves is effectively inhibited, and the anti-interference performance of an electronic system is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor and microelectronic packaging, in particular to an anti-electromagnetic interference microwave power divider and a manufacturing method thereof. Background technique [0002] With the continuous increase of circuit integration, the continuous increase of the main frequency of signals in the system, and the increasingly complex electromagnetic environment of electronic system applications, the electronic system is facing more and more serious electromagnetic interference noise. EMI (Electro Magnetic interference, electromagnetic interference) noise includes conduction EMI noise and radiated EMI noise, in which conducted EMI noise affects other equipment through power terminals or control terminals, can be filtered by capacitors. Radiated EMI noise affects other equipment in the form of space electromagnetic field, the formation mechanism is complex, and it is difficult to analyze and solve EM...

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Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide an anti-electromagnetic interference microwave power divider and its manufacturing method to solve the problem that the traditional microwave power divider introduces space electromagnetic waves and affects the reliability of the electronic system. It has the characteristics of suppressing electromagnetic wave space radiation and improving the anti-interference of electronic systems

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