Quartz flexure accelerometer

Abstract

The invention provides a quartz flexure accelerometer which can improve the measurement precision, is good in sealing performance, and is high in stability. The accelerometer comprises a servo circuit and a meter. The meter comprises an upper torquer, a detection quality assembly, a lower torquer, and a housing. The upper torquer comprises a compensation ring, a magnetic steel, a magnetic pole piece, and an upper yoke. The lower torquer comprises a compensation ring, a magnetic ring, a magnetic pole piece, and a lower yoke. The detection quality assembly comprises a gold-plated film quartz pendulous reed and two torquer coils which are pasted on the quartz pendulous reed.

Description

technical field [0001] The invention relates to a quartz flexible accelerometer, in particular to a quartz flexible accelerometer with a welded sealing structure. Background technique [0002] Quartz flexible accelerometer is a mechanical uniaxial pendulum type, differential capacitance type, torque rebalance type (force feedback type) accelerometer, which is sensitive to physical quantities such as acceleration, speed, distance, swing, tilt, and vibration. The quartz flexible accelerometer is mainly composed of a servo circuit and a meter head to form a closed-loop feedback system. According to Newton's law of mechanics, the acceleration of the carrier is indirectly measured by measuring the inertial force on the carrier. It has the advantages of simple structure, small size, long life, high precision and sensitivity, small temperature coefficient, stable performance, etc. It is widely used in inertial navigation systems of aircraft, missiles, rockets, ships, vehicles, and ...

AI Technical Summary

Problems solved by technology

The output capacitance change of the capacitive signal sensor in the quartz flexible accelerometer is proportional to the square of the displacement, and the resolution is limited. To obtain high resolution, the size of the system needs to be appropriately widened. At the same time, it is affected by electronic noise, mechanical thermal noise and the environment. Influenced by factors such as parasitic capacitance, the output signal-to-noise ratio of the capacitive signal sensor is low, reaching the detection limit of the tiny capacitance detection circuit, and the accuracy of the capacitive quartz flexible accelerometer is difficult to break through μg 0 / ppm level

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