Device and method for simultaneously measuring Hall coefficient and seebeck coefficient

Abstract

The invention belongs to the technical field of semiconductor material test, and particularly relates to a device and a method for simultaneously measuring a Hall coefficient and a seebeck coefficient. The device comprises a straight running slide rail, a magnet group, a test probe and a main heater. Magnet racks are respectively arranged on two ends of the straight running slide rail. A pair of same magnet groups are arranged on each magnet rack. The main heater is arranged on the straight running slide rail. To-be-tested samples are arranged on two sheets of ceramic sheet auxiliary heaters on the surface of the main heater. Test probes are arranged on the main heater. A motor drives the straight running slide rail to move. The invention also discloses the method for simultaneously measuring a Hall coefficient and a seebeck coefficient by use of the device. According to the invention, a problem of high requirements on shape measurement in measurement of the seebeck coefficient is effectively solved; different sizes and shapes of materials can be measured; measurement of the Hall coefficient and the seebeck coefficient at different temperatures is achieved; automatic operation is achieved; and test precision is high.

Description

technical field [0001] The invention belongs to the technical field of semiconductor material testing, and in particular relates to a device and method for simultaneously measuring Hall coefficient and Seebeck coefficient, which can complete the measurement of Hall coefficient and Seebeck coefficient at different temperatures. Background technique [0002] Hall coefficient and Seebeck coefficient, as important parameters to measure the properties of materials, play a very important role in the field of semiconductor research. By measuring the Hall coefficient, important parameters such as the conductivity type, carrier concentration, and carrier mobility of the semiconductor material can be judged. Through the change of the Hall coefficient with temperature, the bandgap width of the semiconductor, impurity ionization, etc. can also be determined. performance parameters. As an important parameter to measure the performance of thermoelectric conversion, the Seebeck coefficien...

AI Technical Summary

Problems solved by technology

The test device combines the similarities of Hall coefficient and Seebeck coefficient in the test, and uses four probes combined with permanent magnets to complete the measurement of Hall and Seebeck coefficients at different temperatures. DePauw method, Seebeck coefficient measurement adopts four probe test methods, which effectively solves the problem of high requirements on the measurement shape in the measurement of Seebeck coefficient, and improves the traditional Hall coefficient measurement device, and realizes the measurement of different sizes, Materials of different shapes, and also realize the measurement of Hall coefficient and Seebeck coefficient at different temperatures, the two tests are concentrated on one device, the structure is simple, the volume is small, and the cost and space are saved. Realize automatic operation and high test accuracy

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