Surface treatment method of air flotation guide rail

Abstract

The invention relates to a surface treatment method of an air flotation guide rail. The surface treatment method comprises the following steps that the air flotation guide rail is arranged into a plasma reaction cavity; the pressure intensity of the plasma reaction cavity is adjusted to be a first value; oxygen and argon are bubbled into the plasma reaction cavity; and the positive pole radio frequency of the plasma reaction cavity is controlled to be 50-100 KHz, and the negative pole radio frequency of the plasma reaction cavity is controlled to be 20-30 KHz, so that glow discharge is achieved for the first time. According to the surface treatment method of the air flotation guide rail, organic residuals on the surface of the air flotation guide rail can be efficiently cleaned, so that the smooth and clean surface is guaranteed, and friction force is reduced to improve the working stability and the precision degree and prolong the service life.

Description

technical field [0001] The invention relates to the field of air-floating guide rails, in particular to a surface treatment method for air-floating guide rails. Background technique [0002] Based on the gas dynamic and static pressure effect, the air bearing guide rail can move smoothly without friction and vibration. It has the characteristics of high motion precision, clean and pollution-free. Due to its error homogenization effect, relatively low manufacturing precision can be used to obtain high guiding precision. Usually, it forms a closed-loop system with servo drive and sensor to achieve high-precision displacement positioning. Therefore, at present, air bearing guide rails are widely used in measuring instruments and precision machinery such as numerical control machine tools. The precision of the air bearing guide rail is closely related to its cleanliness. In order to ensure the precision, regular cleaning is very important. [0003] The traditional surface clea...

AI Technical Summary

Problems solved by technology

However, there will be cleaning fluid residues (often organic residues) on the surface of the cleaned air-floating guide rails. These organic residues will cause vibration, noise, and abnormal noise of high-speed bearings, thereby reducing the working stability and reducing the reliability of machinery such as numerical control equipment. precision, shortened service life