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Self-powered acceleration sensor based on piezoresistive effect and manufacturing method thereof

An acceleration sensor, piezoresistive effect technology, applied in the direction of acceleration measurement using inertial force, etc., can solve problems such as unfavorable integration of microsystems

Active Publication Date: 2017-06-20
TSINGHUA UNIV
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Problems solved by technology

However, these three types of acceleration sensors have a common disadvantage, that is, they all need external power supply, which is not conducive to improving the overall integration of the microsystem.

Method used

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  • Self-powered acceleration sensor based on piezoresistive effect and manufacturing method thereof
  • Self-powered acceleration sensor based on piezoresistive effect and manufacturing method thereof
  • Self-powered acceleration sensor based on piezoresistive effect and manufacturing method thereof

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Embodiment Construction

[0031] The present invention proposes a self-powered acceleration sensor based on the piezoresistive effect and its manufacturing method. The self-powered acceleration sensor has supercapacitor energy storage performance and charging and discharging characteristics, and can sense the acceleration shock signal in the discharge process at the same time. The peak signal response of the voltage rise is generated instantaneously, and the magnitude of the acceleration shock can be measured by the amplitude of the voltage peak. The present invention will be further described below in conjunction with the accompanying drawings.

[0032] figure 1 a. figure 1 b shows the schematic diagram of the self-powered acceleration sensor based on the piezoresistive effect. In the figure, the self-powered acceleration sensor adopts a laminated structure, and the current collector 4, the positive electrode 1, the diaphragm 2, the negative electrode 3 and the current collector 4 are sequentially s...

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Abstract

The invention discloses a self-powered acceleration sensor based on a piezoresistive effect and a manufacturing method thereof, which belongs to the field of acceleration sensors. The self-powered acceleration sensor uses a laminated structure. A current collector, a positive electrode, a diaphragm, a negative electrode and a current collector are successively stacked. The self-powered acceleration sensor senses an acceleration impact signal through the piezoresistive effect of a composite material electrode film. According to the invention, a current collector is made of titanium and other metal materials; a polar needle and a current collector are reliably connected through laser welding; the preparation of a porous electrode uses a dry process; an electrode material with piezoresistive properties is prepared through the combination of polytetrafluoroethylene and a carbon material; the self-powered acceleration sensor is packaged in a metal or plastic housing with a flexible package structure and process through inter-layer airtight package and flexible resin glue encapsulation; self-powered sensing of a high g acceleration signal is realized; and the self-powered acceleration sensor has wide application potentials in the fields of automobile industry, aerospace and weaponry equipment.

Description

technical field [0001] The invention belongs to the field of acceleration sensors, in particular to a piezoresistive effect-based self-powered acceleration sensor and a preparation method. [0002] technical background [0003] Acceleration sensor is a basic sensor, which is widely used in automobile industry, aerospace, weaponry and other fields. At present, the above-mentioned application fields are undergoing rapid industrial development and technological progress, and the following three urgent development requirements are put forward for the performance of the acceleration sensor: 1. The measurement range of the acceleration signal up to tens of thousands of g is applied to the automobile collision test, penetration Weapons and other fields; 2. Acceleration sensor output signals with little or no miscellaneous peak oscillations are used in scenarios such as the identification of continuous multiple acceleration shock signals with short intervals in the field of penetrati...

Claims

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Application Information

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IPC IPC(8): G01P15/12
CPCG01P15/12
Inventor 尤政戴可人王晓峰
Owner TSINGHUA UNIV
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