Bionic gas flow rate sensor of hair seam combination

Abstract

The invention discloses a bionic gas flow rate sensor of hair seam combination. The sensor is formed by an embedded seam hair rod, a fixing pedestal, a first electrode lead wire and a second electrode lead wire. The embedded seam hair rod and the fixing pedestal are assembled into one body so as to form a cantilever beam structure. The first electrode lead wire is led out from a left side and the second electrode lead wire is led out from a right side. The first electrode lead wire and the second electrode lead wire are fixed to the fixing pedestal. The embedded seam hair rod is made of an elastic insulating material. An upper surface, the left side and the right side are coated with conductive material layers. A micro-nano seam is processed on the conductive material layer of the right side along a horizontal direction. When a gas with a slow flow rate flows through, a gas flow and the embedded seam hair rod are interacted so that the embedded seam hair rod generates a certain degree of deflection. When the micro-nano seam of the right side is stretched, a deflection angle is large, a seam width is increased and a resistance is large too. When the micro-nano seam is compressed, the deflection angle is large, the seam width is decreased and the resistance is small. Therefore, perception measurement of a gas flow rate is realized.

Description

technical field [0001] The invention belongs to the technical field of gas flow velocity measurement, and in particular relates to a gas flow velocity sensor. By detecting the resistance change in the circuit, the measured gas flow rate can be determined. Background technique [0002] It is of great significance to accurately measure gas micro-flow velocity. At present, the main gas flow velocity measurement methods include mechanical gas flow velocity measurement and detection, hot-wire hot film gas flow velocity detection (HWA), ultrasonic and laser Doppler (LDA) flow velocity detection methods, etc. However, at present, the above measurement methods have certain problems in practical application: low precision of mechanical detection, easy aging of equipment, and operation is affected by temperature, and the detection fluctuates greatly; the sensor chip must be electrically heated when the hot-wire hot-film gas flow rate is detected. The power consumed is large and it i...

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Problems solved by technology

However, at present, the above measurement methods have certain problems in practical application: low precision of mechanical detection, easy aging of equipment, and operation is affected by temperature, and the detection fluctuates greatly; the sensor chip must be electrically heated when the hot-wire hot-film gas flow rate is detected. It consumes a lot of power and is not suitable for the detection of flammable and explosive gases; ultrasonic and laser Doppler flow velocity detection equipment is complex and expensive, and is generally used in precision measurement laboratories or to calibrate other flowmeters

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