A kind of sico-carbon nanotube composite film electrode for lithium battery
A carbon nanotube composite and thin-film electrode technology, which is applied in battery electrodes, non-aqueous electrolyte battery electrodes, electrode manufacturing, etc., can solve the problems of SiCO charge and discharge lag, cycle performance not meeting the requirements of commercial applications, etc., and achieve adhesion Good, excellent electrochemical characteristics and mechanical properties, the effect of controllable composition
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[0026] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but not as a basis for limiting the present invention.
[0027] Example. A kind of SiCO-carbon nanotube composite film electrode for lithium battery, constitutes as follows figure 1 As shown, a single crystal silicon substrate 1 is included, and a TiN barrier layer 2, a Cu thin film layer 3, a CuO thin film layer 4, a SiCO thin film layer A5, a Ni catalyst layer 6, a carbon nanotube layer 7 and SiCO thin film layer B8.
[0028] The thickness of the TiN barrier layer 1 is 95-105nm.
[0029] The thickness of the Cu thin film layer 2 is 290-310 nm, and the thickness of the CuO thin film layer 4 is 95-105 nm.
[0030] The thickness of the SiCO thin film layer A5 is 190-210 nm; the thickness of the Ni catalyst layer 6 is 45-55 nm; the thickness of the carbon nanotube layer 7 is 95-105 nm; the SiCO thin film layer B8 The thickness is 190-210 nm.
[0031] T...
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