Special gas distribution box and part replacement method thereof

A distribution box and special gas technology, applied in the field of process, can solve problems such as poor operability, achieve high success rate, clean pressure test, simple and safe operation

Active Publication Date: 2017-05-31
WUHAN XINXIN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method of externally connecting the exhaust pump and the exhaust gas treatment system is affected by the site space and environment, and is also restricted by the

Method used

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  • Special gas distribution box and part replacement method thereof

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Embodiment Construction

[0041] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.

[0042] Such as figure 1As shown, a special gas distribution box includes a housing 6 and a first special gas main pipeline 1, one end of the first special gas main pipeline 1 is used to connect with a special gas supply system, and the other end is connected to at least two One end of the special gas branch pipeline 2 is connected, and the other end of each special gas branch pipeline 2 is respectively used to connect with the machine to be supplied; the first special gas main pipeline 1 is provided with a first special gas main pipeline Valve 11, each of the special gas branch pipelines 2 is sequentially provided with a first special gas branch pipeline valve 21 and a second special gas branch pipeline valve 22 alo...

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Abstract

The invention relates to a special gas distribution box and a part replacement method thereof. The special gas distribution box comprises a nitrogen treatment pipe, high-speed flowing nitrogen in the nitrogen treatment pipe is used for generating siphon negative pressure, special gas inside a pipe where a to-be-replaced part is located is extracted, nitrogen is inflated into the pipe where the to-be-replaced part is located through a nitrogen main pipe, extraction and inflation are repeatedly executed multiple times until the concentration of the special gas in the pipe approaches to zero, and then the to-be-replaced part is replaced; an external connection sucking pump and a tail gas treatment system in the prior art are replaced with the nitrogen treatment pipe, and therefore influences of site space and environment and limitation of factory affair arrangement are effectively avoided; and in addition, part replacement operation is simple and safe, and the success rate is high.

Description

technical field [0001] The invention relates to the field of technological processes, in particular to a special gas distribution box and a method for replacing parts thereof. Background technique [0002] Flammable, explosive, poisonous, harmful, corrosive and other special gases, such as monosilane, ammonia and chlorine, are used in the semiconductor process. The special gas used by the machine is delivered from the factory service end through the central gas supply system. A special gas pipeline delivered from the factory service end does not supply gas to a certain machine alone, but supplies gas to multiple machines at the same time. gas. The special gas distribution box is used to distribute a main pipeline into several branch pipelines, so as to supply gas to multiple machines at the same time. [0003] The parts in the special gas distribution box, such as the hand valve and the pneumatic valve, are used to realize the opening and closing of the special gas. Their ...

Claims

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Application Information

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IPC IPC(8): F17D1/04F17D3/01
CPCF17D1/04F17D3/01
Inventor 周成志
Owner WUHAN XINXIN SEMICON MFG CO LTD
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