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Abstract

The invention provides a manipulator which comprises a supporting piece, a pressing piece and a handle. The supporting piece comprises a bearing surface for bearing a tray. The pressing piece comprises a pressing surface for pressing the tray. The handle comprises a first holding part and a second holding part which is connected to the first holding part through a revolute pair. The first holding part is connected to the supporting piece, the second holding part is connected to the pressing piece, the supporting piece and the pressing piece are at one side of the revolute pair, and the first holding part and the second holding part are at the other side of the revolute pair. Through opening and closing the first holding part and the second holding part, the pressing piece and the support piece are mutually separated, or the tray is clamped by the pressing piece and the supporting piece. The pressing piece is provided with an elastic component and is used for applying elastic force of pressing the support piece to the tray when the tray is clamped by the pressing piece and the supporting piece. The manipulator provided by the invention can clamp trays of different thicknesses, thus an application range can be enlarged, and the requirements of taking and placing the trays of different thicknesses by equipment are satisfied.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing, in particular to a loading and unloading hand. Background technique [0002] With the continuous development of microelectronics technology, the competition of related production enterprises is becoming more and more fierce. Reducing costs and improving production efficiency are common means to improve the competitiveness of enterprises. For example, in order to improve production efficiency and reduce production costs, LED light source manufacturers usually use pallet handling to simultaneously transport and etch multiple substrates to cope with the increasing market demand. [0003] To improve process efficiency, multiple trays are usually loaded in the same cassette, figure 1 It is a structural schematic diagram of an existing film box. Such as figure 1 As shown, the cassette 1 has a plurality of slots 2 arranged at intervals along the vertical direction for loading a plura...

AI Technical Summary

Problems solved by technology

[0006] Since the gap between the two opposite surfaces of the supporting member 55 and the pressing member 54 is constant when the first gripping portion 51 and the second gripping portion 52 are closed, the above-mentioned loading and unloading hand can only hold a single Pallets with different thicknesses, and pallets with larger or smaller thicknesses cannot use this loading and unloading hand, so the application range is narrow, and it cannot meet the needs of equipment for picking and placing pallets of different thicknesses

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