Phase Recovery Algorithm Based on Entrance Pupil Scan Modulation Epie
A phase recovery and algorithm technology, applied in the field of optical detection, can solve problems such as seldom considered, and achieve the effect of good stability, high precision and fast convergence speed
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[0054] An ePIE phase recovery algorithm based on entrance pupil scanning modulation, the algorithm steps are as follows:
[0055] Step 1. Build the entrance pupil scanning modulation overlapping imaging device:
[0056] combine figure 1 The entrance pupil scanning modulation overlapping imaging device includes a light source 5, a fixed L-shaped structure 1, a movable L-shaped structure 2, a sample to be tested 3 and a CCD 4, and the fixed L-shaped structure 1 and the movable L-shaped structure 2 are slidably connected to form a rectangular frame 6. Make the movable L-shaped structure 2 move along the width direction of the fixed L-shaped structure 1. The light source 5, the rectangular frame 6, the sample to be tested 3 and the CCD 4 are arranged in sequence on the common optical axis, and the movable L-shaped structure 2 moves along the fixed L-shaped structure 1. The width direction of structure 1 moves, is used for adjusting the size of rectangular frame 6, promptly adjust...
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