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Phase Recovery Algorithm Based on Entrance Pupil Scan Modulation Epie

A phase recovery and algorithm technology, applied in the field of optical detection, can solve problems such as seldom considered, and achieve the effect of good stability, high precision and fast convergence speed

Inactive Publication Date: 2019-02-22
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, little consideration is given to the diaphragm and entrance pupil, which can modulate the illuminating light

Method used

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  • Phase Recovery Algorithm Based on Entrance Pupil Scan Modulation Epie
  • Phase Recovery Algorithm Based on Entrance Pupil Scan Modulation Epie
  • Phase Recovery Algorithm Based on Entrance Pupil Scan Modulation Epie

Examples

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Embodiment 1

[0054] An ePIE phase recovery algorithm based on entrance pupil scanning modulation, the algorithm steps are as follows:

[0055] Step 1. Build the entrance pupil scanning modulation overlapping imaging device:

[0056] combine figure 1 The entrance pupil scanning modulation overlapping imaging device includes a light source 5, a fixed L-shaped structure 1, a movable L-shaped structure 2, a sample to be tested 3 and a CCD 4, and the fixed L-shaped structure 1 and the movable L-shaped structure 2 are slidably connected to form a rectangular frame 6. Make the movable L-shaped structure 2 move along the width direction of the fixed L-shaped structure 1. The light source 5, the rectangular frame 6, the sample to be tested 3 and the CCD 4 are arranged in sequence on the common optical axis, and the movable L-shaped structure 2 moves along the fixed L-shaped structure 1. The width direction of structure 1 moves, is used for adjusting the size of rectangular frame 6, promptly adjust...

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PUM

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Abstract

The invention discloses an ePIE phase recovery algorithm based on entrance pupil scanning modulation. Based on a built entrance pupil scanning modulation overlapping imaging device, a variable-size rectangular box is adjusted to change the entrance pupil, and illumination light is modulated to get diffraction patterns under the condition that no to-be-tested sample is added and diffraction patterns under the condition a to-be-tested sample is added. An extended aperture is introduced to replace the actual aperture. Finally, the phase information of a to-be-tested sample is obtained using the ePIE algorithm twice. The ePIE phase recovery algorithm of the invention has such advantages as imaging without lenses, wide field, fast convergence, and high stability.

Description

technical field [0001] The invention belongs to the field of optical detection, and in particular relates to an ePIE phase recovery algorithm based on entrance pupil scanning modulation. Background technique [0002] Iterative phase recovery algorithms have been widely used to recover the image of the sample under test from the measured diffraction intensities. In recent years, traditional iterative phase recovery algorithms using lenses have made great progress. [0003] In order to get rid of the limitation of the lens, some improved algorithms have also been proposed, such as C.T.Putkunz et al., the scanning diffraction method proposed in the article "Atom-scale ptychographic electron diffractive imaging of boron nitrogen cones", and P. Thibault et al. in "Maximum- Likelihood refinement for coherent diffractive imaging"The maximum approximation method proposed in the article, these methods can reconstruct the phase information of the sample from a series of diffraction p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 高志山黄嘉铃窦建泰崔恒僖杨忠明陈挚张堉晖
Owner NANJING UNIV OF SCI & TECH
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