System and method for enhancing production capacity

Abstract

The invention provides a system and a method for enhancing production capacity. The system comprises an analysis model module and a production forecasting module, wherein the analysis model module is used for collecting historical failure data and inline data of a machine component, so as to establish a forecasting model for failures and the inline data of the machine component; and the production forecasting module is used for forecasting capacity level of a machine by means of the forecasting model, and arranging a priority order of the machine. The system can discover the failures of the machine component timely, thereby enhancing the capacity level and reducing the risk of failure. The method for enhancing the production capacity has the same advantages.

Description

technical field [0001] The invention relates to the field of semiconductor production, in particular to a system and a method for improving production capacity. Background technique [0002] At present, the factory uses an inline monitor to monitor the production capacity (Cpk) of the factory. However, when machine components fail or perform unstable, it often leads to a decline in production capacity, and even the risk of a large number of product obsolescence (OOC / OOS). [0003] The component failure (alarm) of the machine often affects the instability of its production capacity. However, the current production mode only takes improvement measures for the machine when the production capacity is not good. This is often not timely enough and the risk may increase. [0004] At present, only when the production capacity of the machine is not good or it is scrapped, improvement measures are taken for the machine, which is not timely enough and the risk may increase. At presen...

AI Technical Summary

Problems solved by technology

However, when machine components fail or perform unstable, it often leads to a decrease in production capacity, and even the risk of a large number of product obsolescence (OOC / OOS)

[0003] The component failure (alarm) of the machine often affects the instability of its production capacity. However, the current production mode only takes improvement measures for the machine when the production capacity is not good. This is often not timely enough and the risk may increase

[0004] At present, only when the production capacity of the machine is not good or it is scrapped, the improvement measures are taken for the machine, which is not timely enough and the risk may expand

At present, each factory only has a predictive adjustment system (Automatic Process Control, Automatic Process Control, APC system) for the parameters of the machine recipe (recipe) to improve production capacity; , but there is no effective prevention and improvement system, often wait until the Cpk is not good, only to find that it is caused by the instability of the machine components, it is too late

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