White light interference and laser scanning-based morphology measurement device

Abstract

The invention discloses a white light interference and laser scanning-based morphology measurement device comprising a three dimensional motion platform and a white light-laser measurement system positioned on the same. The measurement system comprises a white light source 1, three light splitting prisms, a microscopic ocular lens 5, a microscopic object lens 6, an interference object lens 7, a four-quadrant photoelectric sensor 8, a laser device 9 and an image sensor 10; two measurement optical paths and a laser measurement optical path are provided; the laser optical path has the following structure: light sent via the laser device 9 is turned via a third light splitting prism 4, and then the light is focused onto a surface 11 being measured via the microscopic object lens 6; the light passes through the microscopic object lens 6, the third light splitting prism 4, and a second light splitting prism 3 after being reflected by the surface 11 being measured; then the light is projected to the four-quadrant photoelectric sensor 8 and is used for measuring height information of the surface 11 being measured; light, reflected back by the surface 11 being measured, sent via the laser device 9 is turned via the second light splitting prism 3; after passing through a first light splitting prism 2 and the microscopic ocular lens 5, the light and illumination backlight formed via the white light source 1 are imaged onto the image sensor 10, and a collection image for laser measurement is formed.

Description

technical field [0001] The invention relates to a shape measuring device, in particular to the processing surface quality and shape detection in the manufacturing process of ultra-precision machined mechanical parts and optical components. Background technique [0002] Surface topography refers to the geometry of the interface between the object and the surrounding medium. The basic shape of the surface and surface defect parameters such as waviness, texture, and surface roughness together constitute the characteristics of the original topography of the object surface. The surface morphology formed by machining, surface treatment and other processes directly affects its function and performance. With the rapid development of the defense industry, aerospace and machinery manufacturing and other fields, the demand for ultra-precision machining parts is also increasing, and the surface morphology and structure of products are becoming more and more complex. Therefore, the mecha...

AI Technical Summary

Problems solved by technology

However, the measurement data sampling rate of the above methods is relatively low, and only the basic shape of the surface topography (low-frequency information of the surface topography) can be obtained.

The contact profiler is only suitable for collecting roughness information on a certain contour line of the surface (high frequency information of surface topography)

However, surface detail information such as texture or waviness of surface topography (intermediate frequency information of surface topography) has a great influence on performance

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