Substrate grinding device and substrate cleaning equipment
A technology of grinding device and substrate, applied in grinding device, grinding/polishing equipment, grinding/polishing safety device, etc., can solve the problem of poor uniformity of transmittance of lens antireflection coating, size and uniformity of grinding pressure Difficult to control, serious lens stains, etc., to achieve the effect of automatic cleaning, saving manpower and improving grinding efficiency
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[0055] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.
[0056] As an aspect of the present invention, a substrate grinding device 100 is provided, such as figure 1 As shown, the substrate grinding device 100 includes: a grinding table 110 , a fixing mechanism 120 and a pressure adjusting mechanism 130 . The grinding table 110 is provided with a grinding layer 112, the fixing mechanism 120 is used to fix the substrate 200 to be ground, and the fixing mechanism 120 can move relative to the grinding layer 112 along the surface of the grinding layer 112, so that the fixing mechanism 120 is fixed The surface of the substrate 200 and the abrasive layer 112 rub against each other. The pressure adjusting mechanism 130 is u...
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