A Rapid Measuring Method for Complex Shape

Abstract

The invention discloses a rapid complex topography measurement method. A measurement system involved in the rapid complex topography measurement method comprises a white light source 1, three beam-splitting prisms, a microscope eyepiece 5, a microscope objective 6, an interference objective 7, a four-quadrant photoelectric sensor 8, a laser device 9 and an image sensor 10 and is provided with two measurement optical paths and a laser measurement optical path. The rapid complex topography measurement method includes: disposing the measurement system on a three-dimensional movement platform; focusing a laser measurement portion to a measured surface and subjecting the measured surface to point-by-point scanning measurement according to a spiral line or gate line mode so as to obtain a rough contour feature of the measured surface; focusing a white light interference portion to the measured surface, rapidly positioning a height measurement position of the white light measurement system by every position point of a white light interference measurement path according to a height variation of the obtained rough contour feature, and integrating data in all regions so as to obtain full-frequency-band topographic information of the measured surface.

Description

Technical field [0001] The invention relates to a shape measuring method, in particular to the inspection of the processed surface quality and shape in the manufacturing process of ultra-precision processed mechanical parts and optical components. Background technique [0002] Surface morphology refers to the geometric form of the interface between an object and the surrounding medium. The basic shape of the surface and surface defect parameters such as waviness, texture, and surface roughness together constitute the characteristics of the original surface morphology of the object. The surface morphology formed by machining, surface treatment and other processes directly affects its function and performance. With the rapid development of defense industry, aerospace and machinery manufacturing, the demand for ultra-precision machining parts is also increasing, and the surface morphology and structure of products are becoming more and more complex. Therefore, the need for ultra-pre...

AI Technical Summary

Problems solved by technology

However, the measurement data sampling rate of the above methods is relatively low, and only the basic shape of the surface topography (low-frequency information of the surface topography) can be obtained.

The contact profiler is only suitable for collecting roughness information on a certain contour line of the surface (high frequency information of surface topography)

However, surface detail information such as texture or waviness of surface topography (intermediate frequency information of surface topography) has a great influence on performance

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