Manufacturing method of metal wire for flexible substrate
A technology of metal wires and flexible substrates, applied in semiconductor/solid-state device manufacturing, semiconductor devices, semiconductor/solid-state device components, etc., can solve problems such as easy fracture, achieve stress release, simple and feasible process steps, and improve bending resistance and reliability effects
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[0022] In order to further illustrate the technical means and functions adopted by the present invention to achieve the intended purpose of the invention, the present invention will be described in detail below in conjunction with the accompanying drawings and preferred embodiments.
[0023] Such as figure 1 As shown, the metal wire manufacturing method of the flexible substrate of the present invention includes:
[0024] Step 1: preparing a polyimide solution 20 containing air bubbles 21;
[0025] Step 2: Coating the polyimide solution 20 containing bubbles 21 on a substrate 10 (such as figure 2 shown);
[0026] Step 3: Baking and curing the polyimide solution 20. During the baking and curing process, the bubbles 21 gradually gather to the surface layer of the polyimide solution 20 and burst, forming a substrate with multiple concave holes on the surface. polyimide layer 20';
[0027] Step 4: Deposit metal layer 30 (such as image 3 shown);
[0028] Step 5: patterning ...
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