Gold nanopore thin film three-electrode ionizing sensor array having temperature compensation function

Abstract

The invention discloses a gold nanopore thin film three-electrode ionizing sensor array having a temperature compensation function. The array comprises n sensors with different inter-electrode distances; one sensor is used for detecting the temperature, and a collected current value increases along with increase of the temperature. The other multiple sensors are used for detecting the concentration of mixed gas, and a collected current value decreases along with increase of the gas concentration. Each sensor comprises a first electrode, a second electrode and a third electrode, the inner surface of each first electrode is attached with a metal film substrate distributed with gold nanopores and is provided with small ventilating pores, and the first electrodes of the n sensors are fabricated on a same polar plate; each second electrode is provided with small lead-out pores; each third electrode is provided with a deep groove; the three electrodes are isolated through insulating pillars; the inter-electrode distance of each sensor is set according to the pore diameter of the small ventilating pores, the pore diameter of the lead-out pores and the side length and depth of the deep groove. The sensor array has the advantages of small working voltage, high collected current and high sensitivity, and can be used for simultaneously detecting the gas concentration and temperature of all components.

Description

technical field [0001] The invention relates to the field of gas sensing, in particular to a gold nanoporous film three-electrode ionization sensor array with temperature compensation function. Background technique [0002] The analysis of mixed gases is an important part of scientific research, production process and environmental testing. At present, gas chromatography is the most commonly used method for mixed gas detection, but gas chromatography is complicated to operate, expensive equipment, and cannot realize online measurement, so its application is greatly limited. With the continuous deepening of research at home and abroad, gas identification by using sensor arrays to extract features has become a hot spot in mixed gas sensing technology. Gas sensor array (electronic nose) technology can overcome the above-mentioned shortcomings of gas chromatography and realize continuous, on-line and in-situ measurement of mixed gases. [0003] The main mechanism for the elect...

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Problems solved by technology

[0007] Zhang Yong of Xi'an Jiaotong University and others developed a carbon nanotube sensor with a carbon nanotube film as the cathode ( figure 1 ); through the three-electrode structure and unique electrode voltage design, more positive ions are drawn out; based on figure 1 Sensor structure Zhang Yong, Zhang Jingyuan, Song Xiaohui and others from Xi'an Jiaotong University proposed a carbon nanotube thin film three-electrode sensor array and a mixed gas concentration detection method (ZL201110039018.9) in 2011, but the sensor has a large hole area and reverse electric field The range is limited, only part of the positive ions can be collected, and some positive ions move to the cathode to bombard the carbon tube, so that the collection current is small, resulting in low sensitivity and affecting the performance of the sensor

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