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Surface strain detection device based on elastic substrate and filled interdigital capacitor

A technology of interdigitated capacitors and detectors, which is applied in the field of surface strain detection devices, can solve the problems of large strain, large nonlinearity, application limitations, and low precision, and achieve the effect of high sensitivity and simple structure

Inactive Publication Date: 2016-12-21
CHINA JILIANG UNIV
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  • Application Information

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Problems solved by technology

[0002] The resistance strain gauge measurement method is a traditional means of measuring strain, but the resistance strain gauge is easily affected by the environment (such as electromagnetic field, temperature, humidity, chemical corrosion, etc.), the accuracy is relatively low, and it has a large nonlinearity for large strains. The output signal is weak, so its application is limited to a certain extent

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  • Surface strain detection device based on elastic substrate and filled interdigital capacitor
  • Surface strain detection device based on elastic substrate and filled interdigital capacitor
  • Surface strain detection device based on elastic substrate and filled interdigital capacitor

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Embodiment Construction

[0015] The surface strain detection device based on the elastic substrate sandwich interdigital capacitor of the present invention includes an elastic substrate 1 , a sandwich interdigital capacitor 2 and a cover layer 3 , wherein the sandwich interdigital capacitor 2 is composed of metal wire 4 and metal wire 5 .

[0016] The elastic substrate 1 is an elastic material with a thickness of 300 μm, which can be compressed or stretched under the action of external surface strain to be measured, and is flexible, and can undergo bending deformation according to the surface strain to be measured, and its size can be determined according to the actual situation. Measure the size of the object for production.

[0017] The sandwich interdigitated capacitor 2 is located on the elastic substrate 1, such as figure 1 As shown, the sandwich interdigitated capacitor 2 is composed of a metal wire 4 and a metal wire 5, such as figure 2 As shown, the diameters of the metal wire 4 and the meta...

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Abstract

The invention relates to the technical field of the capacitance sensor, especially to a surface strain detection device based on an elastic substrate and a filled interdigital capacitor. The strain detection device comprises an elastic substrate, a filled interdigital capacitor, and a coverage layer and is manufactured by using a die copy technology. The elastic substrate has elastic and flexible properties and can carry out compression, stretching and bending deformation with the surface strain of a to-be-measured object. The filled interdigital capacitor arranged on the elastic substrate is formed by two metal wires; one metal wire forms an interdigital structure, wherein the interdigital number and space of the interdigital structure can be selected according sensitivity demands; and the other metal wire in a snake shape is arranged in the middle of the interdigital structure to form a structure with filling. A capacitor structure is formed between the two metal wires. The coverage layer having the same material and dimension as those of the elastic substrate covers the elastic substrate and the filled interdigital capacitor and plays a role in protecting the filled interdigital capacitor. Because the strain detection device deforms with the strain of the to-be-detected surface, the capacitance value of the interdigital capacitor changes; and thus the surface strain can be obtained based on detection of the capacitance value.

Description

technical field [0001] The invention relates to the technical field of capacitance sensing, in particular to a surface strain detection device based on elastic substrate sandwich interdigital capacitance. Background technique [0002] The resistance strain gauge measurement method is a traditional means of measuring strain, but the resistance strain gauge is easily affected by the environment (such as electromagnetic field, temperature, humidity, chemical corrosion, etc.), the accuracy is relatively low, and it has a large nonlinearity for large strains. The output signal is weak, so its application is limited to a certain extent. Capacitive sensors have high impedance and low power, have high sensitivity when measuring physical quantities with small values ​​to be measured, and have good temperature stability. The capacitance value of the sensor generally has nothing to do with the electrode material, so materials with low temperature coefficients can be selected, and the s...

Claims

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Application Information

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IPC IPC(8): G01B7/16
CPCG01B7/16G01B7/22
Inventor 刘月明严红梅顾天文张亮
Owner CHINA JILIANG UNIV
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