Array zeroing high precision large working distance autocollimation device and method

Abstract

The invention belongs to the fields of precision measurement technology and optical engineering, and specifically relates to an array zeroing high-precision large-working-distance auto-collimation apparatus and method. The apparatus is formed by a light source, a collimating mirror, a reflecting mirror, and a feedback imaging system. According to the method, through adjustment of the reflecting mirror, reflecting beam is returned to the mirror center of the feedback imaging system, and angle variation of the surface of a measured object is obtained by employing an angle deflection measuring device on the reflecting mirror; a conventional auto-collimation angle measuring system is additionally provided with the reflecting mirror so that the problem of measurement failure due to the deflection of reflecting light of the measured object from the measuring system can be avoided, and the auto-collimation work range is increased with the same working distance, or the working distance is increased with the same auto-collimation work range; moreover, specific designs such as the collimating mirror, the feedback imaging system and the reflecting mirror are provided so that the structure is simple and the manufacturing cost is low; the measuring precision is high especially with low sampling frequency; and the measurement is rapid.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, and in particular relates to an array zeroing high-precision large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundred...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

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