Control method and system in semiconductor processing process
A processing and control system technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of measurement data growth, occupation of host processing resources, etc., and achieve the effect of improving production efficiency and reducing the burden of data processing
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[0052] The information management method of the existing integrated circuit manufacturing plant is that a server, or host, is responsible for the management and processing of silicon chips and the management of processing equipment, that is, the information management method in which the host dominates everything, or is called "master-slave". model". The host manages and processes silicon wafers and the management of processing equipment, including all necessary processes in the process of silicon wafer processing, as well as the storage, processing, and feed-forward of programs and data required for silicon wafer processing after data is collected by related equipment and feedback etc. Among them, almost every movement of the silicon chip needs to be confirmed by the host, which will occupy the processing resources of the host. Especially when the semiconductor process enters 20nm and below, the measurement data will increase exponentially, and this situation will become mor...
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