Real-time measurement apparatus of microgram magnitude quality and measurement method thereof
A real-time measurement and quality technology, applied in the field of measurement, can solve the problems of high-frequency and high-precision real-time measurement of microgram-level quality, and achieve the effect of high-precision and high-frequency measurement
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[0046] 1. Specific parameters:
[0047] In the present invention, the most important implementation parameters include: the size and material of the weighing elastic sheet 3, the non-contact displacement sensor 5, and the surface roughness of the detection target block 2, and the remaining parameters can be freely designed.
[0048] For example, the material of the weighing elastic piece 3 is nickel-chromium alloy steel, the elastic modulus E=206GPa, the size parameters L=10cm, w=1cm, δ=0.02mm.
[0049] The non-contact displacement sensor 5 is the LK-G85 laser displacement sensor of Keyence Corporation, the accuracy of the laser displacement sensor is 0.2 μm, and the measurement range is 1 mm.
[0050] The weighing tray 1 is an aluminum alloy cuboid, and its length, width and height are 50mm×50mm×2mm; the detection target block 2 is an aluminum alloy cuboid, its length, width and height are 5mm×5mm×2mm, and the surface roughness is 0.2μm .
[0051] Both the support platform ...
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