Portable array zero setting high-dynamic-precision large working-distance auto-collimation device and method

A portable, high-dynamic technology, applied in active optical measurement devices, measurement devices, optical devices, etc., can solve the problems of inability to achieve self-collimation and micro-angle measurement, the range should not be too large, and the reflected beam deviates from the entrance pupil.

Active Publication Date: 2016-11-09
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;
[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the la

Method used

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  • Portable array zero setting high-dynamic-precision large working-distance auto-collimation device and method
  • Portable array zero setting high-dynamic-precision large working-distance auto-collimation device and method
  • Portable array zero setting high-dynamic-precision large working-distance auto-collimation device and method

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specific Embodiment 1

[0081] This embodiment is an embodiment of an autocollimation device with high dynamic precision and large working distance for portable array zeroing.

[0082]The portable array zeroing high dynamic precision large working distance self-collimation device of this embodiment, the structural diagram is as follows figure 2 shown. The self-collimation device includes a light source 1, a reflective collimator 22, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; the light beam emitted by the light source 1 passes through a reflective collimator After the straight mirror 22 is collimated into a parallel light beam, it is reflected by the mirror 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the mirror 3 and collected by the feedback imaging system 6 imaging;

[0083] The feedback imaging system 6 is arranged betwe...

specific Embodiment 2

[0086] This embodiment is an embodiment of an autocollimation device with high dynamic precision and large working distance for portable array zeroing.

[0087] The portable array zeroing high dynamic precision large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 5 shown. On the basis of the specific embodiment 1, the portable array zeroing high dynamic precision large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0088] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront ...

specific Embodiment 3

[0090] This embodiment is an embodiment of an autocollimation device with high dynamic precision and large working distance for portable array zeroing.

[0091] The portable array zeroing high dynamic precision large working distance self-collimation device of this embodiment, the structural diagram is as follows Image 6 shown. On the basis of the specific embodiment 1, the portable array zeroing high dynamic precision large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0092] The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation ...

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Abstract

The invention belongs to the technical field of precise measurement and the field of optical engineering, and specifically relates to a portable array zero setting high-dynamic-precision large working-distance auto-collimation device and method. The device is composes of a light source, a collimating mirror, a reflecting mirror and a feedback imaging system. The method is characterized in that the reflecting mirror is adjusted to enable a reflecting light beam to be fed back to the image surface center of the feedback imaging system, and an angle deflection measuring device on the reflecting mirror is utilized to obtain the angle change of the surface of a detected object. The reflecting mirror is added to a conventional auto-collimation angle measuring system, so that the problem that light reflected by the detected object deviates from the measuring system and the measurement is unavailable is avoided, the auto-collimation working range is increased under the identical working distance, or the advantages of the working distance are increased under the identical working range; the specific design of the collimating mirror, the feedback imaging system and the reflecting mirror facilitates the miniaturization, portability and high measurement precision of the device; the assembling process of the detected object is monitored in the whole process; and rapid measurement is available.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, in particular to a portable array zeroing high dynamic precision large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hund...

Claims

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Application Information

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IPC IPC(8): G01B11/26G01C15/00
CPCG01B11/26G01C15/002
Inventor 谭欣然王超谭久彬
Owner HARBIN INST OF TECH
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