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A portable high dynamic precision large working distance autocollimation device and method

A high dynamic and working distance technology, applied in active optical measuring devices, measuring devices, optical devices, etc., can solve the problems that the reflected beam deviates from the entrance pupil, the range cannot be too large, and the self-collimation and micro-angle measurement cannot be realized.

Active Publication Date: 2019-01-29
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;
[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement
[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

Method used

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  • A portable high dynamic precision large working distance autocollimation device and method
  • A portable high dynamic precision large working distance autocollimation device and method
  • A portable high dynamic precision large working distance autocollimation device and method

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specific Embodiment 1

[0073] This embodiment is an embodiment of a portable autocollimation device with high dynamic precision and large working distance.

[0074] The portable self-collimation device with high dynamic precision and large working distance in this embodiment has a schematic structural diagram as shown in figure 2 shown. The self-collimation device includes a light source 1, a reflective collimator 22, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; the light beam emitted by the light source 1 passes through a reflective collimator After the straight mirror 22 is collimated into a parallel light beam, it is reflected by the mirror 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the mirror 3 and collected by the feedback imaging system 6 imaging;

[0075] The feedback imaging system 6 is arranged between the light s...

specific Embodiment 2

[0078] This embodiment is an embodiment of a portable autocollimation device with high dynamic precision and large working distance.

[0079] The portable self-collimation device with high dynamic precision and large working distance in this embodiment has a schematic structural diagram as shown in Figure 5 shown. On the basis of the specific embodiment 1, the portable high dynamic precision and large working distance autocollimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0080] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on...

specific Embodiment 3

[0082] This embodiment is an embodiment of a portable autocollimation device with high dynamic precision and large working distance.

[0083] The portable self-collimation device with high dynamic precision and large working distance in this embodiment has a schematic structural diagram as shown in Image 6 shown. On the basis of the specific embodiment 1, the portable high dynamic precision and large working distance autocollimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0084] The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is a...

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Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering and particularly relates to a portable high-dynamic-precision large-working-distance auto-collimation device and method. The device is composed of a light source, a collimating mirror, a reflecting mirror and a feedback imaging system. The method includes the steps that the reflecting mirror is adjusted, reflected light beams return to the center of the image surface of the feedback imaging system, and the angle change of the surface of a measured object is acquired through an angle deflection measuring device on the reflecting mirror. Due to the fact that the reflecting mirror is additionally arranged on a traditional auto-collimation angle measuring system, the problem that due to the fact that reflected light of the measured object deviates from the measuring system, measurement cannot be carried out can be avoided, and then the advantage that the auto-collimation working range is increased at the same working distance or the working distance is increased within the same working range is achieved; in addition, through the specific design of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the device and method further have the technical advantages that the device is small, portable and high in measuring precision; the assembly process of the measured object can be monitored in the whole course; measurement is rapid.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, in particular to a portable high dynamic precision large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meters...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/26G01C15/00
CPCG01B11/26G01C15/002
Inventor 谭欣然王超谭久彬
Owner HARBIN INST OF TECH
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