Interference standard component error separation method based on least square rotation coupling

Abstract

The invention discloses an interference standard component error separation method based on least square rotation coupling. Based on a vector optical theory, a three-dimensional light tracing simulation system is constructed for a long-focal-length lens zero interference test system, interference standard component surface shape deviations are separated from a long-focal-length lens test result by use of the simulation system, the problem of introduction of error information of the interference standard component surface shape deviations into a final long-focal-length lens measurement result is solved, and high-precision measurement of GRMS and PSD1 of long-focal-length lens transmission wavefronts is realized. In an error separation process, the key is to find out consistency between space attitude of an interference standard component in the three-dimensional light tracing simulation system and attitude during detection of an interferometer, i.e., a space attitude matching problem of the interference standard component. It is brought forward that by use of a least square principle, through continuous rotation of the space attitude of the interference standard component in the three-dimensional light tracing simulation system, differences of output wavefronts of the simulation system and test wavefronts of the interferometer are enabled to be the smallest, and attitude matching is finished.

Description

technical field [0001] The invention belongs to the field of surface shape detection of optical elements, and in particular relates to an error separation method of interference standard parts based on least square rotation matching. Background technique [0002] The high-power solid-state laser driver adopts a multi-channel large-aperture structure, which has a large optical aperture and high laser energy. A large number of large-aperture and high-precision optical components are used in the system. The mid-band spatial frequency components of optical components in high-power solid-state laser drivers will lead to high-frequency modulation of the beam and nonlinear growth of the system, resulting in filamentary damage to optical components and reducing the focusable power of the beam. The evaluation indicators of optical components mainly include PSD and GRMS, among which PSD is an evaluation indicator based on spectrum analysis, which describes the frequency distribution o...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a method for separating errors of interference standards based on least squares rotation matching, which solves the problem that the surface deviation of interference standards introduces error information into the final telephoto lens measurement results, and realizes telephoto lens transmission. GRMS and PSD1 high precision measurements of wavefronts

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