Water-flowing type graphene film preparation device

Abstract

The invention relates to a water-flowing type graphene film preparation device which comprises a high-temperature technological chamber, a low-temperature cooling chamber A, a low-temperature cooling chamber B and a sample boat, wherein sliding rails are horizontally and fixedly arranged along the bottom inner walls of the low-temperature cooling chamber A, the high-temperature technological chamber and the low-temperature cooling chamber B; a flat car is arranged above the sliding rails and in the low-temperature cooling chamber A; the sample boat is arranged on the flat car; the low-temperature cooling chamber A and the low-temperature cooling chamber B are internally and respectively provided with a boat pushing device A and a boat pushing device B that are consistent in structure; the boat pushing device A and the boat pushing device B are respectively and detachably connected with a sample taking rod A and a sample taking rod B; one end, far from the boat pushing device A, of the sample taking rod A can be driven to be connected with or separated from the flat car by the boat pushing device A; and one end, far from the boat pushing device B, of the sample taking rod B can be driven to be connected with or separated from the flat car by the boat pushing device B. The water-flowing type graphene film preparation device has the benefits that the load capacity of the sample boat is increased and continuous production is realized.

Description

technical field [0001] The invention relates to the technical field of graphene film preparation, in particular to a flow-type graphene film preparation device. Background technique [0002] Graphene material is a thin film material with a single layer of carbon atoms arranged in a regular hexagon. It is the first two-dimensional crystal discovered in the world that can exist independently. Graphene is a revolutionary two-dimensional material, called the most disruptive material of the 21st century by the British Times. We live in a three-dimensional space-time, and the objects we see and use every day are composed of tens of thousands of layers of atomic stacks in terms of atomic size. Before 2004, the traditional theory believed that in a three-dimensional space, due to thermodynamic fluctuations, it was impossible for two-dimensional crystal materials to exist independently. Two British scientists repeatedly removed graphite crystals with adhesive tape to obtain single-...

AI Technical Summary

Problems solved by technology

How the sample boat transfers back and forth between the low-temperature cooling chamber and the high-temperature process chamber and the maximum load of the sample transfer structure are the technical bottlenecks that limit the efficiency improvement of continuous large-scale CVD equipment

At present, the graphene equipment prepared by CVD uses a cantilevered transfer paddle to transfer samples. The biggest problem with this transfer mode is the load of the transfer paddle. Considering the problem of force arm and moment, with the increase of growth equipment, the sample needs to be transferred from cooling to If the chamber is transferred to the constant temperature zone of the high-temperature process chamber, the force arm of the transfer paddle needs to be lengthened, so the load at the end will be reduced, which is contrary to the purpose of increasing equipment and increasing production

At the same time, when the sample is cooled, sampled, and loaded in the low-temperature cooling chamber, the high-temperature process chamber is in an idle state, resulting in waste of equipment

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