Optimal three-dimensional morphology measurement method
A technology of three-dimensional topography and measurement method, applied in the field of three-dimensional measurement, can solve problems such as complex three-dimensional solution process, and achieve the effect of simple calibration process, less sources of measurement errors, and fewer calibration parameters.
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[0038] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0039] An optical three-dimensional shape measurement method, comprising the following steps:
[0040] Step 1: According to the actual measurement requirements, arrange a measurement system consisting of a projection system and a camera equipped with a telecentric lens, refer to figure 1 , the optical axis of the projection system and the optical axis of the camera in the measurement system are equivalently collinear through the design of the optical path. In actual use, the optical axis of the projection system and the optical axis of the camera do not have to be collinear. The measurement principle is as follows figure 2 As shown, where ON is the optical axis of the projection system, point B is the intersection point between the optical axis of the projection system and the projection pixel array, and the light emitted from the light source O is p...
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