Device and method for online monitoring particles on surface of optical elements
A technology of surface particles and optical components, applied in the direction of optical testing flaws/defects, etc., to ensure stable operation
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[0025] The technical problems solved by the embodiments of the present invention, the technical solutions adopted and the technical effects achieved are clearly and completely described below in conjunction with the accompanying drawings and specific embodiments. Apparently, the described embodiments are only some of the embodiments of the present application, not all of them. Based on the embodiments in the present application, all other equivalent or obviously modified embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0026] It should be noted that, in the following description, many specific details are given for the convenience of understanding. It may be evident, however, that the present invention may be practiced without these specific details.
[0027] It should be noted that, in the case of no explicit limitation or conflict, various embodiments of the present invention a...
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