Silicon micro-machined gyroscope digital driving closed loop control system
A technology of silicon micro-gyroscope and closed-loop control, which is applied in the general control system, control/regulation system, adaptive control, etc., can solve the problems of insufficient control precision, high noise, and limited range of temperature drift, and overcome the complex structure, Low noise, easy to realize the effect of monolithic integrated ASIC circuit
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[0022] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0023] see figure 1 , a silicon microgyroscope digital drive closed-loop control system described in a preferred embodiment of the present invention, the driving end and the sensitive end of the silicon microgyroscope are connected with a C / V conversion circuit that converts the capacitance signal into a digital signal, a low-pass Filter, amplitude amplifier and ADC converter; the digital signals of the driving end and the sensitive end are respectively connected to the FPGA-based driving closed-loop control circuit and temperature compensation circuit; the driving feedback signal of the driving closed-loop control circuit is transmitted to the driving electrode of the sil...
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