System and method for modifying harmonic oscillator based on chemical etching integrated quartz cylindrical shell

Abstract

The invention belongs to the technical field of vibratory gyroscopes, and particularly relates to a shape modification system and a shape modification system method which are based on chemical etching and used for an integrated quartz cylindrical shell harmonic oscillator. The shape modification system is composed of a coarse-tuning lifting platform, a fine-tuning lifting platform, a first right angle platform, a manual rotating platform, a second right angle platform, an electronic control rotating platform, a fixing support, a chemical shape modification tank, a chemical shape modification solution, a stirring device and a temperature control device; the chemical shape modification tank is made of polypropylene plastic, the stirring device and the temperature control device are arranged in the chemical shape modification tank, and the chemical shape modification solution is contained in the chemical shape modification tank. According to the shape modification system and the shape modification method, the advantages of being simple in system, low in cost, high in shape modification efficiency, easy to operate and the like are achieved, frequency cracking of the integrated quartz cylindrical shell harmonic oscillator can be effectively reduced, the vibration mode deviation angle is corrected, and therefore the whole performance of a cylindrical shell resonant gyroscope can be improved.

Description

technical field [0001] The invention belongs to the technical field of vibrating gyroscopes, and in particular relates to a modification system and modification method for an integrated quartz cylindrical shell resonator based on chemical etching. Background technique [0002] Cylindrical shell resonant gyroscope is a new type of Coriolis Vibratory Gyroscope, which utilizes the influence of the Coriolis effect on the shell when the resonator rotates to cause the movement of the mode shape relative to the shell to realize the rotation angle or Speed ​​measurement. The cylindrical shell resonant gyroscope has the advantages of small size, light weight, long life, short start-up time, low power consumption and strong stability, and has a very broad application prospect in the field of inertial navigation. [0003] The one-piece quartz cylindrical shell resonator is the key component of the cylindrical shell resonant gyroscope. It is generally made of fused silica material with...

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Problems solved by technology

The most common modification method is to process modification grooves on the edge of the resonator [Reference 1: Yi, T., Precision Balance Method for Cupped Wave Gyro Based on Cup-bottom Trimming. CHINESE JOURNAL OF MECHANICAL ENGINEERING [J], 2012.25(1) :p.63-70.], this method can effectively reduce the frequency cracking, but it will seriously affect the quality factor of the harmonic oscillator, and the processing symmetry of the modified groove is difficult to guarantee

Using vacuum ion beam technology to modify the surface of the harmonic oscillator can achieve high modification accuracy [Reference 2: Hu Xiaodong, Luo Kangjun, Yu Bo, etc. Using ion beam technology to balance the mass of the hemispherical oscillator [J]. China Inertia Proceedings of the Fifth Academic Annual Conference of the Technical Society, Guilin, China, 2003: 247-252.], but the equipment used in this method is very expensive

The method of laser modification can achieve accurate point quality removal [Reference 3: Hamelin, B., Localized Eutectic Trimming of Polysilicon Microhemispherical Resonating Gyroscopes [J]. IEEE SENSORS JOURNAL, 2014.14 (10): p.3498-3505.], but It will bring local stress concentration, reduce the quality factor of the harmonic oscillator, and the cost of laser processing is high, and the operation is more complicated

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