Triaxial capacitive accelerometer with sharing of detection capacitors

Abstract

The invention discloses a three-axis capacitive accelerometer with shared detection capacitance, which includes a mass block, a fixed anchor point, a base, and four detection capacitances, wherein each detection capacitance includes fixed comb teeth and movable comb teeth The mass block is fixed to the base through the corresponding fixed anchor point, and is used to generate a motion corresponding to the acceleration when an axial acceleration is applied; the movable comb teeth of the four detection capacitors are connected To the mass block, when an axial acceleration is applied, the movable comb teeth move with the mass block to generate a specific capacitance value change for the axial acceleration. The three-axis capacitive accelerometer with shared detection capacitance involved in the present invention can achieve the purposes of reducing the area of ​​the micro-electromechanical chip, simplifying the detection mode of the detection capacitance and improving the sensitivity of the accelerometer.

Description

technical field [0001] The invention relates to a three-axis accelerometer, in particular to a three-axis capacitive accelerometer with a shared detection capacitance. Background technique [0002] Micro-Electro-Mechanical System (MEMS, Micro-Electro-Mechanical-System) has been widely used in industry, medical, civil, military and other fields because of its small size, low cost, good integration, excellent performance and many other advantages. Many applications. Acceleration sensor, as the most typical device using micro-electromechanical technology, has almost become the standard configuration of various mobile terminals, cameras, game controllers, navigators and other products. MEMS accelerometers can be divided into capacitive, resistive, piezoelectric and so on according to their different detection methods. Among them, the capacitive accelerometer has become the most popular type of accelerometer because of its simple structure, low cost, and high sensitivity and li...

AI Technical Summary

Problems solved by technology

[0009] The disadvantage of the above-mentioned existing solution is that 12 detection capacitors occupy a large part of the area of ​​the micro-electro-mechanical chip, so it is difficult to reduce the area of ​​the micro-electro-mechanical chip; and the space occupied by each detection capacitor is small, because The sensitivity of the accelerometer is proportional to the size of the detection capacitance, so the sensitivity will also be limited

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