Integrated temperature relative humidity sensor

Abstract

The invention discloses a temperature and relative humidity integrated sensor, which belongs to the technical field of sensors, and comprises a semiconductor detection unit, a secondary conversion unit, a signal processing unit and a display, wherein the semiconductor detection unit is provided with two semiconductor strain gauges Repsilon1 and Repsilon2 arranged on a diaphragm with a radius to be r0; each semiconductor strain gauge is compressed and then changed to output a resistance response; the output end of the semiconductor detection unit is connected with the secondary conversion unit; the secondary conversion unit receives an output signal of the semiconductor detection unit; the secondary conversion unit converts the resistance response to a pulse width signal; the output end of the secondary conversion unit is connected with the signal processing unit; the signal processing unit decouples and analyzes the output signal of the secondary conversion unit; and the display is connected with the signal processing unit for displaying the temperature, the relative humidity and the atmospheric pressure of a mounting point. The problem of long time delay during water vapor adsorption and analysis processes by the traditional humidity sensor can be solved, the response is quick, and the elastic element system has a simple structure.

Description

technical field [0001] The invention belongs to the technical field of sensors and relates to an integrated sensor, in particular to an integrated temperature and relative humidity sensor for simultaneously measuring the temperature, relative humidity and atmospheric pressure of an installation environment. Background technique [0002] A sensor is a detection device that can feel the measured information, and can convert the detected information into electrical signals or other required forms of information output according to certain rules, so as to meet the needs of information transmission, processing, storage, display, recording and control requirements. It is the first link to realize automatic detection and automatic control. [0003] Micro-integrated multi-sensor is one of the important directions of sensor technology research and development. Temperature, humidity and atmospheric pressure are important physical quantities in environmental and atmospheric monitorin...

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Problems solved by technology

[0004] According to the deficiencies in the prior art above, the technical problem to be solved by the present invention is to propose an integrated temperature and relative humidity sensor, by setting two semiconductor strain gauges on the diaphragm to measure relative humidity and temperature simultaneously, which solves the problem of the traditional humidity sensor. For the problem of long time lag in the process of water vapor adsorption and analysis, it has the advantage of fast response, and the elastic element system has a simple structure and is easy to implement

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