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Alternative increment type micro-displacement measurement sensor and measurement method

A technology of micro-displacement sensor and displacement sensor, which is applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problems of unsatisfactory measurement accuracy and difficult improvement of measurement accuracy, and achieve reliable measurement, simple structure and high precision. Effect

Active Publication Date: 2016-07-20
泰安泰山科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to: aim at the existing grating sensors existing in the prior art due to the physical structure limitation of the photolithography process, which makes it difficult to improve the measurement accuracy and cannot meet the above-mentioned shortcomings of the increasingly high measurement accuracy requirements, and provides An alternating incremental measuring micro-displacement sensor and its measuring method. The sensor has a simple structure, is suitable for measuring the displacement change of a measured object, has reliable measurement, high precision, and is easy to realize mass production.

Method used

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  • Alternative increment type micro-displacement measurement sensor and measurement method
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  • Alternative increment type micro-displacement measurement sensor and measurement method

Examples

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Effect test

Embodiment 1

[0050] Such as Figure 1-3 As shown, a kind of alternating incremental measuring micro-displacement sensor of the present invention includes a laser beam 11, two mirrors, a photodetector 5, a photodetector 2 6, a guide rail 9, a guide rail 10 and a control processing system.

[0051] The photodetector one 5 is arranged on the guide rail one 9 and can move thereon, the photodetector two 6 is arranged on the guide rail two 10 and can move thereon, and the two reflecting mirrors Arranged in parallel and capable of relative movement, the first photodetector 5 and the second photodetector 6 are arranged at one end of the two reflecting mirrors, and the laser beam 11 is arranged at the opposite end, and the laser beam 11 is incident therein On one of the reflectors, after being alternately reflected by two reflectors, it is emitted to the first photodetector 5 or the second photodetector 6 and is sensed, and the control processing system communicates with the first photodetector 5...

Embodiment 2

[0058] Such as Figure 1-3 As shown, a kind of alternate incremental measuring micro-displacement sensor of the present invention and measured object 8, described sensor comprises laser beam 11, fixed reflector 2, movable reflector 3, photodetector-5, photodetector Device II 6 and control processing system.

[0059] The object to be measured 8 is connected to the movable reflector 3 through a rigid member, and the photodetector one 5 is provided with a detection part 1 51, a detection part 2 52 and a detection part 3 53 at fixed intervals, and the detection part 3 53 is arranged at any position between the straight line connecting the detection part 1 51 and the detection part 2 52, and the photodetector 2 6 is provided with fixed-distance detection part 4 61, detection part 5 62 and detection part 6 63 , the detection part six 63 is arranged at any position between the straight line of the detection part four 61 and the detection part five 62, the fixed reflector 2 is arrang...

Embodiment 3

[0062] Such as Figure 1-3 As shown, an alternating incremental measuring micro-displacement sensor and a measured object 8 according to the present invention, the sensor includes a laser source 1, a laser beam 11, a fixed mirror 2, a moving mirror 3, and a detection mirror 4 , a photodetector one 5, a photodetector two 6 and a control processing system, and also includes a housing and a connector 31.

[0063]The laser beam 11 is obtained by emitting the laser source 1, and the laser source 1, the fixed reflector 2, the movable reflector 3, the detection reflector 4, the photodetector one 5 and the photodetector two 6 are all located in the housing , forming the reading head 7, the reading head 7 is provided with a mounting hole or a sticking piece, the moving mirror 3 is connected to the connecting piece 31, the connecting piece 31 is a rigid piece, and the connecting piece 31 protrudes from the The reading head 7 is externally connected to the measured object 8, and the pho...

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Abstract

The invention discloses an alternative increment type micro-displacement measurement sensor. The alternative increment type micro-displacement measurement sensor comprises a laser beam, two reflection mirrors, a photodetector I, a photodetector II, a guide rail I, a guide rail II and a control processing system. With the adoption of the sensor, the laser beam is continuously reflected between one group of two reflection mirrors which are arranged in parallel, and is finally illuminated on the two groups of photodetectors; the distance between the two reflection mirrors is changed so that a reflection path of the laser beam is changed; each group of photodetector moves on the guide rails and the photodetector senses the laser beam; and the control processing system is used for processing according to light sensing mileages and light sensing directions of the photodetectors to obtain a detection displacement value; and the control processing system can also be used for adding or subtracting a movement distance value on the rails of the photodetectors into or by the detection displacement value, and calculating to obtain a real change value between the two reflection mirrors. The sensor disclosed by the invention is simple in structure, reliable in measurement, relatively high in precision and easy to manufacture in a large batch.

Description

technical field [0001] The invention relates to the field of precision measurement technology and instruments, in particular to an alternating incremental measurement micro-displacement sensor and a measurement method. Background technique [0002] Displacement sensor is a commonly used geometric quantity sensor, which is widely used in many fields such as aerospace, industrial production, machinery manufacturing and military science. There are many ways to measure displacement. Smaller displacements (such as less than 1cm) are usually detected by strain gauges, inductances, differential transformers, eddy currents, and Hall sensors. Larger displacements (such as greater than 1cm) are usually detected by induction synchronization. Sensors, gratings, capacitive grids, magnetic grids and other sensing technologies to measure. Among them, the grating sensor has the advantages of easy digitalization, high precision (currently the highest resolution can reach the nanometer level...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 张白康学亮
Owner 泰安泰山科技有限公司
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