Atmospheric pressure discharge cold plasma generator

Abstract

The utility model relates to an atmospheric pressure discharge cold plasma generator, which belongs to the technical field of plasma. The generator comprises an upper partition, a radio frequency electrode, a lower partition and a ground electrode; the radio frequency electrode is connected with the radio frequency power supply, and the ground electrode is connected with the ground wire of the radio frequency power supply; the upper partition covers the radio frequency electrode. It is characterized in that the radio frequency electrode is provided with protruding parallel slats, the ground electrode and the lower partition are provided with narrow grooves matching the slats of the radio frequency electrode, and the parallel slats of the radio frequency electrode can pass through the narrow gap of the lower partition The slots are inserted in parallel between the narrow slots of the ground electrode or through the narrow slots of the ground electrode and then inserted in parallel between the parallel strips of the ground electrode; between the parallel strips of the radio frequency electrode and the narrow slots of the ground electrode or between the narrow slots of the ground electrode A plasma discharge chamber is formed between the grooves and parallel slats; there are vertical and horizontal gas channels inside the lower partition, which can evenly distribute the working gas to each discharge chamber. By applying a voltage, a large volume of uniform plasma is generated under normal pressure. plasma jet.

Description

technical field [0001] The invention belongs to the field of plasma technology, and in particular relates to an atmospheric pressure discharge cold plasma generator. Background technique [0002] At present, a large area of ​​non-equilibrium cold plasma can be generated under low pressure conditions, but it needs to be completed in a vacuum chamber, which cannot achieve continuous operation. application range. At present, there are two types of plasma that can be generated under atmospheric pressure conditions. One is thermal plasma, such as plasma generated by an electric arc, with a temperature of about 10,000K. For materials that are afraid of heat, its application is limited; the other is cold plasma. Body, such as plasma generated by corona discharge and dielectric barrier discharge, has a temperature close to room temperature. [0003] In order to increase the area of ​​cold plasma, most existing cold plasma generators use a flat electrode structure. For example, CN...

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Problems solved by technology

[0004] Whether it is a cold plasma generator composed of two flat metal electrodes whose surfaces are parallel to each other or an array type cold plasma generator composed of multiple flat plates, although a large area of ​​plasma can be formed, it is difficult to guarantee the generated plasma. Homogeneity of cold plasma

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