A miniature two-degree-of-freedom planar motion ultrasonic motor

Abstract

The invention discloses a minitype two-degree-of-freedom planar motion ultrasonic motor. The motor comprises an elastic pre-compression apparatus, a piezoelectric ceramic stator and a sliding block connected in sequence, wherein the piezoelectric ceramic stator is a piezoelectric ceramic rod with a multi-layered structure; a friction head is adhered to the top end of the piezoelectric ceramic rod, and the sliding block is arranged on the friction head; the elastic pre-compression apparatus is arranged at the bottom of the piezoelectric ceramic stator for providing pre-compression force to realize frictional contact between the piezoelectric ceramic stator and the sliding block; the stator can generate a first-order longitudinal telescopic vibration mode L1 in a longitudinal Z direction, a second-order bending vibration mode B2X in a transverse X direction, and a fourth-order bending vibration mode B4Y in a transverse Y direction under voltage excitation; the executed composite mode enables the friction head at the end part to perform a micro-amplitude high-frequency elliptical motion within an XZ plane, or perform a 8-shaped micro-amplitude high-frequency motion within a YZ plane so as to drive the sliding block contacted with the friction head to move along the X direction or the Y direction or to perform a translation motion of any direction within an XY plane.

Description

technical field [0001] The invention relates to a two-degree-of-freedom piezoelectric ultrasonic motor, which belongs to the field of precision driving. Background technique [0002] In the field of micro-electromechanical systems, industries such as precision manufacturing have put forward higher requirements for precision drives. However, the traditional electromagnetic motor is limited by its working principle, the torque / mass ratio is not large enough, the energy efficiency drops significantly when the volume is reduced, and it cannot be self-locking when the power is turned off. Ultrasonic motors using the inverse piezoelectric effect and the friction principle thus show great advantages in the field of precision drives. [0003] Compared with traditional motors, ultrasonic motors have the following characteristics: simple structure, compact structure, large torque / mass ratio (3~10 times that of traditional motors); low-speed high-torque, no gear reduction mechanism, a...

AI Technical Summary

Problems solved by technology

B 2X Modal with B 2Y The modes are isomorphic modes that are orthogonal to each other and have close resonant frequencies. Due to the possible structural asymmetry in the motor preparation process, B may be simultaneously excited when the sliding block is driven to move in one direction (such as the X direction). 2Y The movement of the slider along the Y direction due to the modal makes it difficult to control the motor

Images