Micro gas chromatographic column chip and preparation method thereof

Abstract

The invention discloses a micro gas chromatographic column chip. The chip comprises a silicon substrate, wherein parallel channels which are sequentially communicated are formed in the silicon substrate, regularly arranged silicon substrate cylinders are arranged in the channels, the height of the cylinders is consistent with the depth of the channels, a gas inlet and a gas outlet are also formed in the silicon substrate, a sealing layer is arranged on the silicon substrate and sealed with the silicon substrate through a sealant, so that the gas inlet, the channels and the gas outlet form a closed gas flow path, and a double-layer stationary phase structure is arranged on the channels and cylinder surfaces in the gas flow path. According to the chip, the contact area of stationary phases can be increased by the aid of cylinder structures, meanwhile, the double-layer stationary phase structure is adopted, the separating capacity of the chromatographic column chip can be enhanced, and the separation variety of the chip for samples can be increased.

Description

technical field [0001] The invention belongs to the field of microelectronic technology and chromatographic analysis technology, and relates to a gas chromatographic chip and a preparation method thereof, in particular to a micro gas chromatographic column chip and a preparation method thereof. The chip is suitable for the separation of mixed gases and can be applied to food Safety, drug detection, field environmental survey, etc. Background technique [0002] Chromatography is a method of separation and analysis, which is widely used in analytical chemistry, organic chemistry, biochemistry and other fields. Chromatography uses the selective distribution of different substances in different phase states to elute with a mixture of mobile and stationary phases. Different substances in the mixture will move along the stationary phase at different speeds, and finally achieve the separation effect. Due to its large size, traditional gas chromatography is not conducive to portabi...

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Problems solved by technology

[0004] However, the existing miniature gas chromatographic column chips are limited in size due to the limited length of the chromatographic column. Therefore, the area of ​​the stationary phase in the channel is limited, which leads to uneven contact between the stationary phase and the mixture during the separation process. The separation of the mixture is insufficient; on the other hand, due to the limitation of the type of stationary phase, the separation performance of a micro-chromatographic column for complex mixed gases

Therefore, the above unfavorable factors limit the separation performance of micro-columns and reduce the response of low-concentration samples.

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