Triaxial stereo football-shaped micro-gyroscope and processing method thereof
A micro-gyroscope, football-shaped technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc., can solve problems such as restricting the development of production applications, improve detection accuracy and sensitivity, facilitate processing and manufacturing, The effect of reducing package size
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[0034] The technical solutions of the present invention will be described in detail below, but the protection scope of the present invention is not limited to the embodiments.
[0035] like figure 1 and figure 2 As shown, a three-axis three-dimensional football-shaped micro-gyroscope of the present invention includes two layers of glass substrates 2 stacked up and down and a main unit structure 1 installed between the glass substrates 2 on both sides. The main unit structure 1 includes a three-dimensional mass Block 1-1, inner elastic beam 1-2, outer elastic beam 1-3, driving structure and detection structure; three-dimensional mass block 1-1 is in the shape of a football (a sphere composed of regular pentagons) and is located in the main unit structure 1 In the central position, the three-dimensional mass 1-1 is connected to the outer elastic beam 1-3 through four groups of inner elastic beams 1-2, and the four outer elastic beams 1-3 are fixedly connected in sequence to fo...
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