Triaxial stereo football-shaped micro-gyroscope and processing method thereof

A micro-gyroscope, football-shaped technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc., can solve problems such as restricting the development of production applications, improve detection accuracy and sensitivity, facilitate processing and manufacturing, The effect of reducing package size

Active Publication Date: 2016-04-06
SOUTHEAST UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, most of the existing micro gyroscopes cannot meet the above requirements, which greatly limits its development and production application.

Method used

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  • Triaxial stereo football-shaped micro-gyroscope and processing method thereof
  • Triaxial stereo football-shaped micro-gyroscope and processing method thereof
  • Triaxial stereo football-shaped micro-gyroscope and processing method thereof

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Embodiment Construction

[0034] The technical solutions of the present invention will be described in detail below, but the protection scope of the present invention is not limited to the embodiments.

[0035] like figure 1 and figure 2 As shown, a three-axis three-dimensional football-shaped micro-gyroscope of the present invention includes two layers of glass substrates 2 stacked up and down and a main unit structure 1 installed between the glass substrates 2 on both sides. The main unit structure 1 includes a three-dimensional mass Block 1-1, inner elastic beam 1-2, outer elastic beam 1-3, driving structure and detection structure; three-dimensional mass block 1-1 is in the shape of a football (a sphere composed of regular pentagons) and is located in the main unit structure 1 In the central position, the three-dimensional mass 1-1 is connected to the outer elastic beam 1-3 through four groups of inner elastic beams 1-2, and the four outer elastic beams 1-3 are fixedly connected in sequence to fo...

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Abstract

The invention discloses a triaxial stereo football-shaped micro-gyroscope and a processing method thereof. The micro-gyroscope comprises two glass substrates which are piled up and down, and a main unit structure arranged between the two glass substrates, the main unit structure comprises a stereo mass block, inner elastic beams, outer elastic beams, a driving structure and a detecting structure; the stereo mass block has a football-shaped shape, and is positioned in the center position of the main unit structure, the stereo mass block is connected is connected to the outer elastic beams through four groups of the inner elastic beams, and the detecting structure comprises two X-axial detecting electrodes, two Y-axial detecting electrodes and two Z-axial detecting electrodes; and the driving structure comprises two X-axial driving electrodes respectively positioned in positive and negative X-axial directions, two Y-axial driving electrodes respectively positioned in positive and negative Y-axial directions, and two Z-axial driving electrodes respectively positioned in positive and negative Z-axial directions. The triaxial stereo football-shaped micro-gyroscope has the advantages of simple structure, small size, convenient processing and manufacturing, great increase of the yield, good measurement precision and wide market prospect.

Description

technical field [0001] The invention relates to the field of micro-electromechanical and inertial sensors, in particular to a three-axis three-dimensional football-shaped micro-gyroscope and a processing method thereof. Background technique [0002] As MEMS manufacturing technology becomes more and more advanced, micro-mechanical inertial sensors have been rapidly developed and more extensively researched and applied. The micro gyroscope belongs to a kind of micro-mechanical vibration angular rate sensor. It measures the angular velocity by measuring the Coriolis acceleration of the rotating object. After data processing, the object's direction, attitude and other information can be obtained. It is an important inertial navigation system. device. [0003] At present, the research work of gyroscope has been pursuing smaller size, lower price and higher precision. However, most of the existing micro gyroscopes cannot meet the above requirements, which greatly limits their de...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5691
CPCG01C19/5691
Inventor 夏敦柱高海钰邓睿胡异炜
Owner SOUTHEAST UNIV
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