Cathode arc ion plating magnetic field adjustment device

Abstract

Provided is a cathode arc magnetic field adjustment device. A cathode target base is arranged in a physical vapor deposition (PVD) film plating machine shell. A groove is formed in the upper surface of the cathode target base. A target is arranged in the groove. A water channel is formed in the cathode target base. The adjustment device comprises a screw arranged on the lower surface of the cathode target base. A magnet device is arranged on the screw and can move along the screw. The magnet device comprises a stainless steel circular ring with a U-shaped cross section. A permanent magnet is arranged in a U-shaped groove of the stainless steel circular ring. A polytetrafluoroethylene layer is arranged on the central hole wall of the stainless steel circular ring, and a thread is arranged on the surface of the polytetrafluoroethylene layer and engaged with the surface of the screw. According to the cathode arc magnetic field adjustment device, in the cathode arc ion plating process, the permanent magnet can be moved backwards or forwards according to the consumption and replacement process of the target, and thus a magnetic field on the surface of the target can be conveniently adjusted. Meanwhile, the permanent magnet and the screw are insulated through polytetrafluoroethylene so that the position of the magnet can be safely adjusted in real time in the target working process, the stability of an arc current, the deposition rate and film performance is kept, and the stability and repeatability of the film plating technology are guaranteed. The cathode arc magnetic field adjustment device is simple in structure, convenient, flexible, rapid and safe to adjust, and good in film plating effect.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, and relates to a cathode arc ion plating magnetic field adjustment device. Background technique [0002] Arc ion plating technology is currently the most successful PVD coating technology, which is widely used in tool and mold surface coating. It uses metal cathode material as cathode, and evaporates and ionizes the target material through arc discharge with the anode shell. , forming a space plasma, coating the coating material on the surface of the workpiece, so that the performance of the workpiece is greatly improved. The cathode material is the coating material, at 10~10 -1 Under the condition of Pa vacuum, the arc starting electrode contacts with the cathode instantaneously, and the arc is ignited at the moment when the arc starting electrode leaves. The low-voltage and high-current power supply maintains the continuous arc discharge, and the arc spot moves on the surface of the cat...

AI Technical Summary

Problems solved by technology

However, as the thickness of the target is continuously consumed and the thickness becomes thinner, the magnetic field on the surface of the target changes. If the magnetic field on the surface of the target cannot be adjusted conveniently, quickly and safely, the quality of the coating will be affected, and the personal safety of the coating personnel will also be threatened.

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