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an atomic generator

A generator and atom technology, which is applied in the direction of phonon exciter, maser, accelerator, etc., can solve the problems of angular distribution and density control of atoms that cannot be exported, and achieve improved atom utilization, high insulation requirements, and improved Effect of divergence angle distribution

Active Publication Date: 2017-12-12
HUAZHONG UNIV OF SCI & TECH
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  • Description
  • Claims
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Problems solved by technology

The outlet of the device is a general circular outlet, there is no special design for the outlet, and the angular distribution and density of the outlet atoms cannot be controlled

Method used

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Embodiment Construction

[0030] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0031] refer to Figure 1 to Figure 5 , an atomic generator, including a vacuum flange 6, a gas introduction module, a tungsten capillary 11 heating module, a thermal insulation module, a cooling module and an outlet module, wherein,

[0032] The gas introduction module includes a gas supply source 1, a vacuum trim valve 2 and a gas supply pipe 16, the gas supply source 1 is connected to the ga...

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Abstract

The invention discloses an atom generator comprising a vacuum flange, a gas introducing module, a heating module, a heat insulation module, a cooling module and an outlet module. The gas introducing module comprises a gas supply source, a vacuum micro-adjusting valve and a gas supply tube. The heating module comprises a power supply, a tungsten capillary and tungsten heating elements. The heat insulation module comprises a molybdenum heat insulation layer which is fixedly installed on the vacuum flange. The cooling module comprises a cooling sleeve which sleeves the molybdenum heat insulation layer. The outlet module comprises an outlet support which is arranged below the tungsten capillary. The outlet support is fixedly installed on the tungsten heat insulation layer and is provided with a conical internal hole. The center line of the conical internal hole and the center line of the tungsten capillary are collinear, and the diameter of the top end of the center line is less than that of the bottom end. The output support with the conical internal hole is additionally arranged at an atom outlet so that flux density of atoms at a small polar angle can be increased, flux density of the atoms at a large polar angle can be suppressed, angular distribution of atomic beams at the outlet can be improved and atom utilization rate can be enhanced.

Description

technical field [0001] The present invention belongs to the field of atomic generators. Background technique [0002] The atomic generator is mainly used in the field of surface science and thin film technology, and can be used for thin film preparation, material surface cleaning, surface nitriding, oxidation and other treatments, and can also be used for atomic and molecular physics research. [0003] Chinese Patent Publication No. CN201410411357.9 discloses a polycapillary-based hydrogen atom generation device for splitting hydrogen into hydrogen atoms. The device includes a plurality of adjacent metal capillaries, and metal heating coils are arranged outside the metal capillaries. And turn on the high-frequency alternating current to generate a high-speed alternating magnetic field, so that the metal capillary in the magnetic field will generate countless eddy currents under the action of electromagnetic induction. into a hydrogen atom. The device mainly cracks hydrogen...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05H3/02
CPCH05H3/02
Inventor 李小平丁甜田雷敏
Owner HUAZHONG UNIV OF SCI & TECH
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